Synthesis of free-standing Ga 2 O 3 films for flexible devices by water etching of Sr 3 Al 2 O 6 sacrificial layers

2019 ◽  
Vol 28 (1) ◽  
pp. 017305 ◽  
Author(s):  
Xia Wang ◽  
Zhen-Ping Wu ◽  
Wei Cui ◽  
Yu-Song Zhi ◽  
Zhi-Peng Li ◽  
...  
Keyword(s):  
Free Standing ◽  
Flexible Devices ◽  
Sacrificial Layers ◽  
Water Etching

scholarly journals Facile Chemical Route to Prepare Water Soluble Epitaxial Sr 3 Al 2 O 6 Sacrificial Layers for Free‐Standing Oxides

2021 ◽  
pp. 2001643
Author(s):  
Pol Salles ◽  
Ivan Caño ◽  
Roger Guzman ◽  
Camilla Dore ◽  
Agustín Mihi ◽  
...  
Keyword(s):  
Water Soluble ◽  
Free Standing ◽  
Chemical Route ◽  
Sacrificial Layers

Fabrication and electrical study of large area free-standing membrane with embedded GaP NWs for flexible devices

2020 ◽  
Vol 31 (46) ◽  
pp. 46LT01 ◽  
Author(s):  
F M Kochetkov ◽  
V Neplokh ◽  
V V Fedorov ◽  
A D Bolshakov ◽  
V A Sharov ◽  
...  
Keyword(s):  
Large Area ◽  
Free Standing ◽  
Flexible Devices ◽  
Electrical Study

scholarly journals Use of Amphoteric Copolymer Films as Sacrificial Layers for Constructing Free-Standing Layer-by-Layer Films

Materials ◽  
2013 ◽  
Vol 6 (6) ◽  
pp. 2351-2359 ◽  
Author(s):  
Baozhen Wang ◽  
Yu Tokuda ◽  
Koji Tomida ◽  
Shigehiro Takahashi ◽  
Katsuhiko Sato ◽  
...  
Keyword(s):  
Layer By Layer ◽  
Free Standing ◽  
Copolymer Films ◽  
Sacrificial Layers

Fabrication of free-standing multilayer films by using pH-responsive microgels as sacrificial layers

2014 ◽  
Vol 292 (5) ◽  
pp. 1235-1240 ◽  
Author(s):  
Jiawei Zhang ◽  
Bin Yuan ◽  
Zhiqiang Wang ◽  
Tao Chen
Keyword(s):  
Multilayer Films ◽  
Ph Responsive ◽  
Free Standing ◽  
Sacrificial Layers

New Sacrificial Layer-Based Screen-Printing Process for Free-Standing Thick-Films Applied to MEMS

2007 ◽  
Vol 4 (3) ◽  
pp. 86-92 ◽  
Author(s):  
Claude Lucat ◽  
Patrick Ginet ◽  
Francis Ménil
Keyword(s):  
Aqueous Solution ◽  
Screen Printing ◽  
Sacrificial Layer ◽  
Strontium Carbonate ◽  
Inorganic Materials ◽  
Free Standing ◽  
New Process ◽  
Sacrificial Layers ◽  
Piezoelectric Transformers ◽  
Structural Layer

Thick-film sacrificial layers based on inorganic materials have been used for the fabrication of free-standing screen-printed films. A specific polymer ink based on a mixture of epoxy and strontium carbonate has been prepared for screen-printing of the sacrificial layer. After deposition and subsequent heat treatments of the structural and sacrificial layers, the latter is removed in an aqueous solution. The harmlessness and efficiency of the process have been demonstrated with regard to the structural layer(s). This new process, initially developed in our laboratory for the fabrication of a cantilever type beam, has been extended to the elaboration of an electrothermal actuator, constituted of two linked copper beams of different widths. The beams are partially suspended above the substrate to which they are anchored. Other developments include the fabrication of heating resistors and microchannels. Moreover, the process has been shown to facilitate the implementation of microassemblies such as piezoelectric transformers.

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