Stress evolution in AlN layers grown on c-Al2O3 by plasma-assisted molecular beam epitaxy at metal-rich conditions
2018 ◽
Vol 1124
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pp. 022041
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1982 ◽
Vol 40
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pp. 442-445
1985 ◽
Vol 43
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pp. 368-369
1989 ◽
Vol 47
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pp. 608-609
1998 ◽
Vol 184-185
(1-2)
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pp. 1085-1089
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