scholarly journals Effects of Gas Composition in Producing Carbon Nanomaterials by Plasma Enhanced Chemical Vapor Deposition

2022 ◽  
Vol 2152 (1) ◽  
pp. 012052
Author(s):  
Chen Yang
Keyword(s):  
Carbon Nanotubes ◽  
Vapor Deposition ◽  
Carbon Nanomaterials ◽  
Chemical Vapor ◽  
Gas Composition ◽  
New Materials ◽  
Important Method ◽  
Growth Regime ◽  
Factors Influencing ◽  
Carbon Nanowalls

Abstract Carbon nanomaterials are becoming new materials which can be used in many fields including transistors, sensors, displays, hydrogen storage, capacitors, catalyst supporters and so on. PECVD is an important method for producing carbon nanomaterials. However, it remains a challenge to control the final production of the PECVD process. This paper tries to figure out the gas factors influencing the growth of different carbon nanomaterials. This paper begins with a brief introduction of PECVD and the growth regime of carbon nanowalls and carbon nanotubes. It discusses how the Argon, carbon source, hydrogen and other gas affect the growth of CNMs. The paper ends with a discussion on the practical influence of confirming the function of each gas.

Combined growth of carbon nanotubes and carbon nanowalls by plasma-enhanced chemical vapor deposition

Carbon ◽  
2007 ◽  
Vol 45 (15) ◽  
pp. 2932-2937 ◽  
Author(s):  
Alexander Malesevic ◽  
Sorin Vizireanu ◽  
Raymond Kemps ◽  
Annick Vanhulsel ◽  
Chris Van Haesendonck ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Carbon Nanowalls

Effects of Feed Gas Composition and Catalyst Thickness on Carbon Nanotube and Nanofiber Synthesis by Plasma Enhanced Chemical Vapor Deposition

2008 ◽  
Vol 8 (6) ◽  
pp. 3068-3076 ◽  
Author(s):  
R. K. Garg ◽  
S. S. Kim ◽  
D. B. Hash ◽  
J. P. Gore ◽  
T. S. Fisher
Keyword(s):  
Carbon Nanotubes ◽  
Phase Composition ◽  
Chemical Vapor Deposition ◽  
Carbon Nanotube ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Computational Study ◽  
Chemical Vapor ◽  
Gas Composition ◽  
Hydrogen Mixture

Many engineering applications require carbon nanotubes with specific characteristics such as wall structure, chirality and alignment. However, precise control of nanotube properties grown to application specifications remains a significant challenge. Plasma-enhanced chemical vapor deposition (PECVD) offers a variety of advantages in the synthesis of carbon nanotubes in that several important synthesis parameters can be controlled independently. This paper reports an experimental study of the effects of reacting gas composition (percentage methane in hydrogen) and catalyst film thickness on carbon nanotube (CNT) growth and a computational study of gas-phase composition for the inlet conditions of experimentally observed carbon nanotube growth using different chemical reaction mechanisms. The simulations seek to explain the observed effects of reacting gas composition and to identify the precursors for CNT formation. The experimental results indicate that gas-phase composition significantly affects the synthesized material, which is shown to be randomly aligned nanotube and nanofiber mats for relatively methane-rich inlet gas mixtures and non-tubular carbon for methane-lean incoming mixtures. The simulation results suggest that inlet methane-hydrogen mixture coverts to an acetylene-methane-hydrogen mixture with minor amounts of ethylene, hydrogen atom, and methyl radical. Acetylene appears to be the indicator species for solid carbon formation. The simulations also show that inlet methane-hydrogen mixture does not produce enough gas-phase precursors needed to form quality CNTs below 5% CH4 concentrations in the inlet stream.

Cobalt supported on carbon nanotubes for methane chemical vapor deposition towards carbon nanotubes

2021 ◽  
Author(s):  
Laura Esteves ◽  
Hugo Alvarenga Oliveira ◽  
Y. T. Xing ◽  
Fabio Barboza Passos
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Heterogeneous Catalysis ◽  
Vapor Deposition ◽  
Supported Catalysts ◽  
Chemical Vapor

Carbon nanotubes (CNT) application in heterogeneous catalysis has been attracting growing interest. However, the use of CNT-supported catalysts in the chemical vapor deposition for the production of new CNT is...

Fabrication of short and straight carbon nanotubes by chemical vapor deposition

2008 ◽  
Vol 476 (1-2) ◽  
pp. 230-233 ◽  
Author(s):  
Haipeng Li ◽  
Naiqin Zhao ◽  
Chunnian He ◽  
Chunsheng Shi ◽  
Xiwen Du ◽  
...  
Keyword(s):  
Carbon Nanotubes ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor
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