ABSTRACTWe demonstrate a new two step laser recrystallization for crystallographic
orientation control. In the cw Ar ion laser recrystallization of silicon
stripes in the structure consisting of SiO2
grooves/polycrystalline Si sublayer/backing substrates, first, one edge of
poly-Si stripes is intentionally recrystallized under relatively low laser
power and a long dwell time in order to form a strong <100> texture
with lamellar grains, second, poly-Si stripes are fully recrystallized using
the above <100> texture as seed crystals by scanning a laser beam
along the stripes. We discuss a strong <100> texture formation related
to partially molten state in the first process of secondary seed formation,
and use of a grooved structure with poly-Si sublayer suppressing edge
nucleation during lateral epitaxy.