scholarly journals Effect of post-deposition annealing on the structural and electrical properties of RF sputtered hafnium oxide thin films

2016 ◽  
Vol 115 ◽  
pp. 012015
Author(s):  
K C Das ◽  
S P Ghosh ◽  
N Tripathy ◽  
G Bose ◽  
J P Kar
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Hafnium Oxide ◽  
Oxide Thin Films ◽  
Post Deposition Annealing ◽  
Structural And Electrical Properties ◽  
Post Deposition

Effect of reactive magnetron sputtering parameters on structural and electrical properties of hafnium oxide thin films

2014 ◽  
Vol 301 ◽  
pp. 28-33 ◽  
Author(s):  
Magdalena Szymańska ◽  
Sylwia Gierałtowska ◽  
Łukasz Wachnicki ◽  
Marcin Grobelny ◽  
Katarzyna Makowska ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Hafnium Oxide ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Oxide Thin Films ◽  
Structural And Electrical Properties

Influence of post-deposition annealing on the electrical properties of zinc oxide thin films

2014 ◽  
Vol 573 ◽  
pp. 22-26 ◽  
Author(s):  
Hui Kyung Park ◽  
Jaeseung Jo ◽  
Hee Kyeung Hong ◽  
Jaeyeong Heo
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Electrical Properties ◽  
Oxide Thin Films ◽  
Post Deposition Annealing ◽  
Post Deposition

Structural and electrical properties of lanthanum oxide thin films deposited by laser ablation

2002 ◽  
Vol 197-198 ◽  
pp. 522-526 ◽  
Author(s):  
M.F Vignolo ◽  
S Duhalde ◽  
M Bormioli ◽  
G Quintana ◽  
M Cervera ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Electrical Properties ◽  
Lanthanum Oxide ◽  
Oxide Thin Films ◽  
Structural And Electrical Properties

scholarly journals The effect of post-deposition annealing conditions on structural and thermoelectric properties of sputtered copper oxide films

RSC Advances ◽  
2020 ◽  
Vol 10 (49) ◽  
pp. 29394-29401
Author(s):  
Chandrasekaran Abinaya ◽  
Kevin Bethke ◽  
Virgil Andrei ◽  
Jonas Baumann ◽  
Beatrix Pollakowski-Herrmann ◽  
...  
Keyword(s):  
Thin Films ◽  
Copper Oxide ◽  
Thermoelectric Properties ◽  
Oxide Films ◽  
Thermoelectric Performance ◽  
Annealing Atmosphere ◽  
Oxide Thin Films ◽  
Post Deposition Annealing ◽  
Annealing Conditions ◽  
Post Deposition

This study reveals the interplay between the composition and thermoelectric performance of mixed copper oxide thin films, which can be finely adjusted by varying the annealing atmosphere.

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