Effect of substrate temperature on structural and electrical properties of RF sputtered hafnium oxide thin films

2015 ◽  
Author(s):  
K. C. Das ◽  
S. P. Ghosh ◽  
N. Tripathy ◽  
G. Bose ◽  
T. Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Substrate Temperature ◽  
Hafnium Oxide ◽  
Oxide Thin Films ◽  
Structural And Electrical Properties

Effect of reactive magnetron sputtering parameters on structural and electrical properties of hafnium oxide thin films

2014 ◽  
Vol 301 ◽  
pp. 28-33 ◽  
Author(s):  
Magdalena Szymańska ◽  
Sylwia Gierałtowska ◽  
Łukasz Wachnicki ◽  
Marcin Grobelny ◽  
Katarzyna Makowska ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Hafnium Oxide ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Oxide Thin Films ◽  
Structural And Electrical Properties

Structural and electrical properties of lanthanum oxide thin films deposited by laser ablation

2002 ◽  
Vol 197-198 ◽  
pp. 522-526 ◽  
Author(s):  
M.F Vignolo ◽  
S Duhalde ◽  
M Bormioli ◽  
G Quintana ◽  
M Cervera ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Ablation ◽  
Electrical Properties ◽  
Lanthanum Oxide ◽  
Oxide Thin Films ◽  
Structural And Electrical Properties

Optical, structural, and electrical properties of indium oxide thin films prepared by the sol-gel method

1997 ◽  
Vol 82 (2) ◽  
pp. 865-870 ◽  
Author(s):  
Radhouane Bel Hadj Tahar ◽  
Takayuki Ban ◽  
Yutaka Ohya ◽  
Yasutaka Takahashi
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Indium Oxide ◽  
Sol Gel ◽  
Oxide Thin Films ◽  
Gel Method ◽  
Sol Gel Method ◽  
Structural And Electrical Properties
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