scholarly journals The microstructure, mechanical and electrical properties of Niobium pentoxide-doped Titanium oxide ceramic targets

Author(s):  
Qi Ling ◽  
TingTing Xu ◽  
LianZi Wu ◽  
Wei Peng ◽  
ZuoXiang Zhu ◽  
...  
2016 ◽  
Vol 2016 ◽  
pp. 1-6
Author(s):  
Ling-yun Han ◽  
Yong-chun Shu

Aluminium-doped zinc oxide (AZO) ceramic green compacts at a size of 170 × 340 × 17 mm have been prepared by slip casting. An AZO slurry with good fluidity and viscosity was obtained when 1.2 wt% of dispersant was added, which indicates that the slurry prepared with micrometre particles is more suitable for slip casting. The densification and electrical properties of the AZO targets prepared by particles with different sizes were investigated after sintering from 1380 to 1460°C. The results showed that the relative density of the AZO target prepared with 45 nm particles could reach nearly 98% at 1380°C; the resistivity of the AZO target prepared with nanometre particles could be as low as 1.6 × 10−3 Ω·cm at 1400°C; and the average transmittance of the AZO film prepared with nanometre particles could reach a maximum value of 93.73% in the visible region at 250 W. In this study, the correlation between the density, resistivity, and grain growth of AZO ceramic green compacts was studied.


2016 ◽  
Vol 697 ◽  
pp. 198-202 ◽  
Author(s):  
Chen Bing Pi ◽  
Xue Xian Cai ◽  
Chao Xiao ◽  
Hai Peng Yang ◽  
Ji Hua Gao ◽  
...  

The ultrahigh density zinc oxide doped with 1wt% TiO2 (ZTO) ceramic targets were prepared by pressureless sintering. Scanning electron microscopy and X-ray diffraction analysis were used to characterize the morphologies and structure of the sintered ZTO targets. The effects of the sintering temperatures on the microstructure, densification behavior, mechanical and electrical properties were discussed and the optimal sintering condition was obtained. The ZTO targets sintered at 1350°C for 3 hours achieved a relative density of 99.7%, a bending strength of 115MPa, a Vickers hardness of 222.16HV and a a electrical resistivity of 1Ω·cm, which was excellent as a high-quality sputtering target to deposit ZnO-based transparent conductive films.


2021 ◽  
Author(s):  
Syifa’ Muhammad Sharifuddin ◽  
Mohd Shukri Mat Nor ◽  
Fathin Asila Mohd Pabli ◽  
Wannarat Chueangchayaphan ◽  
Zainal Arifin Ahmad ◽  
...  

2010 ◽  
Vol 35 (1) ◽  
pp. 59-69 ◽  
Author(s):  
Fares Serradj ◽  
Rebal Guemini ◽  
Hichem Farh ◽  
Karim Djemmal

2015 ◽  
Vol 57 (11) ◽  
pp. 1485-1490 ◽  
Author(s):  
S. A. Vorozhtsov ◽  
А. P. Khrustalyov ◽  
D. G. Eskin ◽  
S. N. Кulkov ◽  
N. Alba-Baena

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