The use of isotope separators for ion implantation

Electromagnetic isotope separators serve a dual scientific purpose. The large production machines continue to provide the only practicable source of many stable isotopes, while the smaller laboratory separators have proved to be versatile research instruments in a variety of fields. The use of experimental separators in nuclear spectroscopy is now well established, and they have also been successfully employed in the study of ion-solid interactions. More recently they have proved particularly useful in the ion doping of semiconductors. The use of the separator for hyperfine interaction studies combines the stringent but largely disparate requirements of the nuclear and the ion implantation applications. The advantages and the limitations of this method of sample preparation are considered in some detail and briefly compared with other possible techniques.

1978 ◽  
Vol 39 (C6) ◽  
pp. C6-367-C6-368 ◽  
Author(s):  
C. W. Kimball ◽  
van Landuyt ◽  
C. Barnett ◽  
G. K. Shenoy ◽  
B. D. Dunlap ◽  
...  

1974 ◽  
Vol 7 (10) ◽  
pp. 1881-1891 ◽  
Author(s):  
A Amusa ◽  
P Debrunner ◽  
H Frauenfelder ◽  
E Munck ◽  
G DePasquali

1988 ◽  
Vol 21 (36) ◽  
pp. 6169-6175 ◽  
Author(s):  
D Kothari ◽  
S Phanjoubam ◽  
J S Baijal ◽  
P Kishan ◽  
C Prakash

1971 ◽  
Vol 178 (1) ◽  
pp. 155-171 ◽  
Author(s):  
Z. Berant ◽  
M.B. Goldberg ◽  
G. Goldring ◽  
S.S. Hanna ◽  
H.M. Loebenstein ◽  
...  

2021 ◽  
Author(s):  
Kuang-Tse Ho ◽  
Cheng-Che Li

Abstract This research summarizes failure analysis results about ionimplantation related issues in Si-based power devices, including diode, MOSFET and IGBT. To find out this kind of defects, sample preparation, fault isolation and SCM inspection are critical steps, which will be explained in detail in this paper.


2020 ◽  
Vol 10 (1) ◽  
Author(s):  
Hyunseok Oh ◽  
Jiwon Yun ◽  
M. H. Abobeih ◽  
Kyung-Hoon Jung ◽  
Kiho Kim ◽  
...  

Abstract Efficiently detecting and characterizing individual spins in solid-state hosts is an essential step to expand the fields of quantum sensing and quantum information processing. While selective detection and control of a few 13C nuclear spins in diamond have been demonstrated using the electron spin of nitrogen-vacancy (NV) centers, a reliable, efficient, and automatic characterization method is desired. Here, we develop an automated algorithmic method for decomposing spectral data to identify and characterize multiple nuclear spins in diamond. We demonstrate efficient nuclear spin identification and accurate reproduction of hyperfine interaction components for both virtual and experimental nuclear spectroscopy data. We conduct a systematic analysis of this methodology and discuss the range of hyperfine interaction components of each nuclear spin that the method can efficiently detect. The result demonstrates a systematic approach that automatically detects nuclear spins with the aid of computational methods, facilitating the future scalability of devices.


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