Total dissociation cross section of CF4and other fluoroalkanes for electron impact

1982 ◽  
Vol 25 (3) ◽  
pp. 1420-1430 ◽  
Author(s):  
Harold F. Winters ◽  
Mitio Inokuti
1992 ◽  
Vol 45 (3) ◽  
pp. 317 ◽  
Author(s):  
RA Bonham ◽  
MR Bruce

New results for the total neutral dissociation cross section and an estimate of the gross cross section for the production of neutral fluorine by electron impact on CF4 have been obtained by combining previously reported results for the total dissociation cross section and the counting cross section for the total dissociative ionisation. This advancement was made possible by recently reported results for multication formation obtained from coincidence experiments. The estimate of the neutral fluorine production cross section is of the same order of magnitude as the total dissociation cross section itself, a similarity which may explain why CF4 is such an effective etching gas. The available cross section data for electron impact energies between 5 and 200 e V are reviewed.


2021 ◽  
pp. 100032
Author(s):  
Himani Tomer ◽  
Paresh Modak ◽  
Nidhi Sinha ◽  
Bobby Antony

2016 ◽  
Vol 25 (5) ◽  
pp. 055016 ◽  
Author(s):  
Annemie Bogaerts ◽  
Weizong Wang ◽  
Antonin Berthelot ◽  
Vasco Guerra

Sign in / Sign up

Export Citation Format

Share Document