Fabrication and characterization of micromachined rectangular waveguide components for use at millimeter-wave and terahertz frequencies

2000 ◽  
Vol 48 (8) ◽  
pp. 1293-1302 ◽  
Author(s):  
J.W. Digby ◽  
C.E. McIntosh ◽  
G.M. Parkhurst ◽  
B.M. Towlson ◽  
S. Hadjiloucas ◽  
...  



2011 ◽  
Vol 64 (1) ◽  
pp. 67-72 ◽  
Author(s):  
Chong Li ◽  
Ata Khalid ◽  
Sonia H. Paluchowski Caldwell ◽  
Martin C. Holland ◽  
Geoff M. Dunn ◽  
...  


2020 ◽  
Vol 41 (3) ◽  
pp. 245-257
Author(s):  
Adrian Gomez-Torrent ◽  
Joachim Oberhammer

AbstractThis paper reports for the first time on a micromachined interposer platform for characterizing highly miniaturized multi-port sub-THz waveguide components. The reduced size of such devices does often not allow to connect them to conventional waveguide flanges. We demonstrate the micromachined interposer concept by characterizing a miniaturized, three-port, 220–330-GHz turnstile orthomode transducer. The interposer contains low-loss micromachined waveguides for routing the ports of the device under test to standard waveguide flanges and integrated micromachined matched loads for terminating the unused ports. In addition to the interposer, the measurement setup consists of a micromachined square-to-rectangular waveguide transition. These two devices enable the characterization of such a complex microwave component in four different configurations with a standard two-port measurement setup. In addition, the design of the interposer allows for independent characterization of its sub-components and, thus, for accurate de-embedding from the measured data, as demonstrated in this paper. The measurement setup can be custom-designed for each silicon micromachined device under test and co-fabricated in the same wafer due to the batch nature of this process. The solution presented here avoids the need of CNC-milled test-fixtures or waveguide pieces that deteriorate the performance of the device under test and reduce the measurement accuracy.





2004 ◽  
Author(s):  
Ermile Gaganidze ◽  
Karsten Litfin ◽  
Johannes Boehm ◽  
Steffi Finke ◽  
Patric Henzi ◽  
...  


2019 ◽  
Vol 35 (4) ◽  
pp. 475-484
Author(s):  
SHIVA ARUN ◽  
◽  
PRABHA BHARTIYA ◽  
AMREEN NAZ ◽  
SUDHEER RAI ◽  
...  




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