Spatial profiles of metastable densities and electric field strengths in parallel-plate radio frequency discharges

1996 ◽  
Vol 24 (1) ◽  
pp. 121-122 ◽  
Author(s):  
G.A. Hebner ◽  
K.E. Greenberg
Keyword(s):  
Electric Field ◽  
Radio Frequency ◽  
Parallel Plate ◽  
Radio Frequency Discharges ◽  
Field Strengths

Plasma sheath electric field strengths above a grooved electrode in a parallel-plate radio-frequency discharge

1999 ◽  
Vol 27 (1) ◽  
pp. 70-71 ◽  
Author(s):  
U. Czarnetzki ◽  
G.A. Hebner ◽  
D. Luggenholscher ◽  
H.F. Dobele ◽  
M.E. Riley
Keyword(s):  
Electric Field ◽  
Radio Frequency ◽  
Parallel Plate ◽  
Plasma Sheath ◽  
Radio Frequency Discharge ◽  
Field Strengths

Sheath electric field oscillation and ion kinetics in radio‐frequency discharges

1996 ◽  
Vol 79 (12) ◽  
pp. 8976-8981 ◽  
Author(s):  
Majida Fadlallah ◽  
Jean‐Paul Booth ◽  
Jacques Derouard ◽  
Nader Sadeghi ◽  
Philippe Belenguer
Keyword(s):  
Electric Field ◽  
Radio Frequency ◽  
Radio Frequency Discharges ◽  
Field Oscillation

Power Measurements for Radio‐Frequency Discharges with a Parallel‐Plate‐Type Reactor

1998 ◽  
Vol 145 (5) ◽  
pp. 1701-1708 ◽  
Author(s):  
Hiroaki Kawata ◽  
Takashi Kubo ◽  
Masaaki Yasuda ◽  
Kenji Murata
Keyword(s):  
Radio Frequency ◽  
Parallel Plate ◽  
Type Reactor ◽  
Radio Frequency Discharges ◽  
Power Measurements ◽  
Plate Type

Electric field reversals in the sheath region of capacitively coupled radio frequency discharges at different pressures

2008 ◽  
Vol 41 (10) ◽  
pp. 105214 ◽  
Author(s):  
J Schulze ◽  
Z Donkó ◽  
B G Heil ◽  
D Luggenhölscher ◽  
T Mussenbrock ◽  
...  
Keyword(s):  
Electric Field ◽  
Radio Frequency ◽  
Capacitively Coupled ◽  
Sheath Region ◽  
Radio Frequency Discharges

Field-induced ionization of excited luminescent centers at high electric field strengths

1997 ◽  
Vol 72-74 ◽  
pp. 112-113 ◽  
Author(s):  
Zhidong Lou ◽  
Zheng Xu ◽  
Feng Teng ◽  
Xurong Xu
Keyword(s):  
Electric Field ◽  
High Electric Field ◽  
Luminescent Centers ◽  
Field Strengths
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