A precision compensation method for space manipulator trajectory planning is presented for improving the accuracy during the execution of a task. First, the control process is described by using a state space equation. Second, process parameters are estimated in real-time using particle filter. Then, the system’s real time operational reliability is calculated based on the state space equation and process parameters. Finally, a control variable compensation strategy is given based on the theory of Statistical Process Control. Simulations show that this method effectively improves the accuracy and stability of space manipulator control system.