Performance assessment of a multi-level repulsive-force out-of-plane microelectrostatic actuator

2006 ◽  
Vol 31 (2) ◽  
pp. 71-75 ◽  
Author(s):  
S. He ◽  
R. Mrad
Keyword(s):  
Performance Assessment ◽  
Repulsive Force ◽  
Out Of Plane ◽  
Multi Level

A New Design of Large Stroke Micro-Deformable Mirror Actuated by Electrostatic Repulsive Force

2008 ◽  
Author(s):  
Fangrong Hu ◽  
Jun Yao ◽  
Chuankai Qiu ◽  
Dajia Wang
Keyword(s):  
Electric Field ◽  
Resonant Frequency ◽  
Adaptive Optics ◽  
Bottom Electrode ◽  
Sacrificial Layer ◽  
Electrostatic Force ◽  
Repulsive Force ◽  
Deformable Mirror ◽  
Optical Aberrations ◽  
Out Of Plane

In this paper, a MEMS mirror actuated by an electrostatic repulsive force has been proposed and analyzed. The mirror consists of four U-shape springs, a fixed bottom electrode and a movable top electrode, there are many comb fingers on the edges of both electrodes. When the voltage is applied to the top and bottom electrodes, an asymmetric electric field is generated to the top movable fingers and springs, thus a net electrostatic force is produced to move the top plate out of plane. This designed micro-mirror is different from conventional MDM based on electrostatic-attractive-force, which is restricted by one-third thickness of the sacrificial layer for the pull-in phenomenon. The characteristic of this MDM has been analyzed, the result shows that the resonant frequency of the first mode is 8 kHz, and the stroke reaches 10μm at 200V, a MDM with large strokes can be realized for the application of adaptive optics in optical aberrations correction.

JUPPI: A multi-level feature based method for PPI prediction and a refined strategy for performance assessment

2020 ◽  
pp. 1-1
Author(s):  
Anup Kumar Halder ◽  
Soumyendu Sekhar Bandyopadhyay ◽  
Piyali Chatterjee ◽  
Mita Nasipuri ◽  
Dariusz Plewczynski ◽  
...  
Keyword(s):  
Performance Assessment ◽  
Feature Based ◽  
Multi Level ◽  
Ppi Prediction

Characteristics of 12 μm Thick Polysilicon for an Optically-Sensed Accelerometer

1999 ◽  
Author(s):  
Y. H. Chen ◽  
T. D. Kudrle ◽  
N. C. Tien
Keyword(s):  
Surface Roughness ◽  
New Technology ◽  
Stress Gradient ◽  
Surface Micromachining ◽  
Polysilicon Film ◽  
Out Of Plane ◽  
Polysilicon Films ◽  
Polysilicon Layer ◽  
Multi Level ◽  
Large Capacitance

Abstract A low-stress thick polysilicon surface micromachining process has been successfully developed. An accelerometer composed of a 12μm thick polysilicon layer and an integrated photo diode on the substrate was fabricated and tested demonstrating the functionality of the process. The polysilicon film has an estimated stress of 0.6 MPa (tensile). This new technology combines some of the advantages of high-aspect-ratio bulk-micromachining such as large capacitance and high out-of-plane stiffness, with the proven advantages typically found for surface micromachining such as the formation of multi-level elements. In this paper, we first present the optimized process flow, which provides the low-stress thick polysilicon film. Then, the important characteristics of thick polysilicon films such as internal stress, stress gradient and surface roughness are discussed. Testing of the integrated photodiode was performed. Finally, the initial testing results for the accelerometer are presented to demonstrate the success of this newly developed technology.

scholarly journals A Low Voltage Electrostatic Micro Actuator for Large Out-of-Plane Displacement

2014 ◽  
Author(s):  
Shahrzad Towfighian ◽  
Siyuan He ◽  
Ridha Ben Mrad
Keyword(s):  
Low Voltage ◽  
Element Model ◽  
Repulsive Force ◽  
Low Voltage Operation ◽  
Out Of Plane ◽  
Static Modeling ◽  
Previous Design ◽  
Repulsive Forces ◽  
Plane Displacement ◽  
Auto Focusing

An electrostatic actuator is designed to move a 1 mm mirror, 58 μm out of plane at 25 volts. Large out-of-plane displacement is obtained from repulsive forces generated on four sets of comb drive fingers attached to the mirror plate in the middle. The proposed actuator is a customized design of a previous study for low voltage applications. The static modeling of the actuator was performed using a coupled-field finite element model of the actuator, including mechanical and electrical domains. Low voltage operation is achieved by decreasing the finger width and the lateral spacing, which increased the generated repulsive force at a specified voltage in a unit cell of the actuator. Decreasing the lateral spacing also enabled increasing the number of fingers, which could increase the repulsive-force, and consequently the torque and the rotation angles when the vertical gap between moving and fixed fingers is small. However, the redesigned actuator has a lower stiffness compared to the previous design. The actuator is optimized for auto-focusing applications in cell phone cameras that require voltages below 30 Volts for user safety. In the intended auto-focusing module, the actuators do not carry the lens and auto-focusing is obtained by moving the mirror attached to the actuators.

Performance Assessment Of Different Singlephase Multi-Level Inverter

2015 ◽  
Author(s):  
P. Kumar ◽  
S. Das ◽  
A. Ganguly ◽  
A. Sharma ◽  
C.K. Tamang ◽  
...  
Keyword(s):  
Performance Assessment ◽  
Multi Level

scholarly journals Nested Buildings: An Innovative Strategy for the Integrated Seismic and Energy Retrofit of Existing Masonry Buildings with CLT Panels

2021 ◽  
Vol 13 (3) ◽  
pp. 1188
Author(s):  
Maria Rosa Valluzzi ◽  
Elisa Saler ◽  
Alberto Vignato ◽  
Matteo Salvalaggio ◽  
Giorgio Croatto ◽  
...  
Keyword(s):  
High Performance ◽  
Coupled System ◽  
Innovative Strategy ◽  
Energy Retrofit ◽  
System A ◽  
Hygrothermal Performance ◽  
Out Of Plane ◽  
Multi Level ◽  
Innovative Techniques ◽  
Existing Structure

The Italian building heritage is aged and inadequate to the high-performance levels required nowadays in terms of energy efficiency and seismic response. Innovative techniques are generating a strong interest, especially in terms of multi-level approaches and solution optimizations. Among these, Nested Buildings, an integrated intervention approach which preserves the external existing structure and provides a new structural system inside, aim at improving both energy and structural performances. The research presented hereinafter focuses on the strengthening of unreinforced masonry (URM) buildings with cross-laminated timber (CLT) panels, thanks to their lightweight, high stiffness, and good hygrothermal characteristics. The improvement of the hygrothermal performance was investigated through a 2D-model analyzed in the dynamic regime, which showed a general decreasing in the overall thermal transmittance for the retrofitted configurations. Then, to evaluate the seismic behavior of the coupled system, a parametric linear static analysis was implemented for both in-plane and out-of-plane directions, considering various masonry types and connector spacings. Results showed the efficiency of the intervention to improve the in-plane response of walls, thus validating possible applications to existing URM buildings, where local overturning mechanisms are prevented by either sufficient construction details or specific solutions.

scholarly journals Development of a novel automated micro-assembly mechanism

2021 ◽  
Author(s):  
Yuan Xue
Keyword(s):  
Repulsive Force ◽  
Experimental Result ◽  
Vertical Position ◽  
The Novel ◽  
Wafer Level ◽  
External Interference ◽  
Micro Assembly ◽  
Assembly Mechanism ◽  
Out Of Plane ◽  
External Acceleration

In this thesis a novel automated micro assembly mechanism is developed. The assembly mechanism utilizes repulsive-force actuators to flip surface-micromachined 2D structures out-of-plane and assemble them into 3D micro devices. The novel micro assembly mechanism is suitable for wafer-level multi-devices batch assembly without external interference. It can assemble 2D structures not only at the vertical position (perpendicular to the substrate) but also at positions at any angle to the substrate. Two approaches, i.e., graphic method and analytical method, are proposed for designing the micro assembly mechanism. Prototypes are fabricated using the PolyMUMPs surface micromachining technology and tested. The experimental results verify the concept of the novel automated micro assembly mechanism. The strength of the assembled 3D structures in terms of withstanding external acceleration is calculated. The calculated result well matches the experimental result which is about 7g. Using the micro assembly mechanism, 1D and 2D rotation micromirrors are designed for various applications.

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