50-W average power, 200-Hz repetition rate, 480-fs KrF excimer laser with gated gain ampliflcation

Technical Digest. Summaries of papers presented at the Conference on Lasers and Electro-Optics. Postconference Technical Digest (IEEE Cat. No.01CH37170) ◽

10.1109/cleo.2001.947527 ◽

2001 ◽

Author(s):

Y. Nabekawa ◽

D. Yoshitomi ◽

T. Sekikawa ◽

S. Watanebe

Keyword(s):

Excimer Laser ◽

Repetition Rate ◽

Average Power ◽

Krf Excimer Laser

Download Full-text

High repetition rate KrF excimer laser for microphotolithography

Technical Digest. CLEO/Pacific Rim'95. The Pacific Rim Conference on Lasers and Electro-Optics ◽

10.1109/cleopr.1995.521342 ◽

1995 ◽

Author(s):

T. Kakuno ◽

T. Enami ◽

K. Kakizaki

Keyword(s):

Excimer Laser ◽

Repetition Rate ◽

High Repetition Rate ◽

High Repetition ◽

Krf Excimer Laser

Download Full-text

Investigation of Weakly Ionized Plasma Channel by Accumulation Effect of Charged Particles Using High Repetition Rate KrF Excimer Laser

IEEJ Transactions on Fundamentals and Materials ◽

10.1541/ieejfms1990.121.9_828 ◽

2001 ◽

Vol 121 (9) ◽

pp. 828-832 ◽

Author(s):

Michiteru Yamaura ◽

Nobuya Hayashi ◽

Satoshi Ihara ◽

Saburoh Satoh ◽

Chobei Yamabe

Keyword(s):

Excimer Laser ◽

Repetition Rate ◽

Plasma Channel ◽

Charged Particles ◽

High Repetition Rate ◽

High Repetition ◽

Accumulation Effect ◽

Weakly Ionized ◽

Weakly Ionized Plasma ◽

Krf Excimer Laser

Download Full-text

High Repetition Rate Operation of a KrF Excimer Laser Using a High Voltage Switch with MOSFETs

IEEJ Transactions on Industry Applications ◽

10.1541/ieejias.121.453 ◽

2001 ◽

Vol 121 (4) ◽

pp. 453-460

Author(s):

Akihiro Suzuki ◽

Akihiko Iwata ◽

Kenyu Haruta

Keyword(s):

Excimer Laser ◽

High Voltage ◽

Repetition Rate ◽

High Repetition Rate ◽

High Repetition ◽

Krf Excimer Laser

Download Full-text

Evaluation of Weakly Ionized Plasma Channel by Accumulation Effect of Charged Particles Using High-Repetition-Rate KrF Excimer Laser

Japanese Journal of Applied Physics ◽

10.1143/jjap.41.6394 ◽

2002 ◽

Vol 41 (Part 1, No. 11A) ◽

pp. 6394-6397 ◽

Author(s):

Michiteru Yamaura ◽

Nobuya Hayashi ◽

Satoshi Ihara ◽

Saburoh Satoh ◽

Chobei Yamabe

Keyword(s):

Excimer Laser ◽

Repetition Rate ◽

Plasma Channel ◽

Charged Particles ◽

High Repetition Rate ◽

High Repetition ◽

Accumulation Effect ◽

Weakly Ionized ◽

Weakly Ionized Plasma ◽

Krf Excimer Laser

Download Full-text

High-efficiency high-repetition rate KrF excimer laser

Electronics and Communications in Japan (Part II Electronics) ◽

10.1002/ecjb.4420721105 ◽

1989 ◽

Vol 72 (11) ◽

pp. 40-52

Author(s):

Kazuaki Hotta ◽

Motohiro Arai ◽

Sinji Ito

Keyword(s):

Excimer Laser ◽

Repetition Rate ◽

High Efficiency ◽

High Repetition Rate ◽

High Repetition ◽

Krf Excimer Laser

Download Full-text

Energy-density and repetition-rate dependences of the KrF-excimer-laser-induced 1.9-eV emission band in type-III fused silicas

Physical Review B ◽

10.1103/physrevb.47.3078 ◽

1993 ◽

Vol 47 (6) ◽

pp. 3078-3082 ◽

Author(s):

Nobu Kuzuu ◽

Yoshikazu Komatsu ◽

Masataka Murahara

Keyword(s):

Energy Density ◽

Excimer Laser ◽

Repetition Rate ◽

Emission Band ◽

Type Iii ◽

Krf Excimer Laser

Download Full-text

Design and characteristics of high pulse repetition rate and high average power excimer laser systems

IEEE Journal of Quantum Electronics ◽

10.1109/3.97278 ◽

1991 ◽

Vol 27 (10) ◽

pp. 2332-2339 ◽

Author(s):

M.L. Sentis ◽

P. Delaporte ◽

B.M. Forestier ◽

B.L. Fontaine

Keyword(s):

Excimer Laser ◽

Repetition Rate ◽

Pulse Repetition Rate ◽

Average Power ◽

Pulse Repetition ◽

High Average Power ◽

High Pulse Repetition Rate ◽

Laser Systems ◽

Download Full-text

High-average-power femtosecond KrF excimer laser

IEEE Journal of Selected Topics in Quantum Electronics ◽

10.1109/2944.974226 ◽

2001 ◽

Vol 7 (4) ◽

pp. 551-558 ◽

Author(s):

Y. Nabekawa ◽

D. Yoshitomi ◽

T. Sekikawa ◽

S. Watanabe

Keyword(s):

Excimer Laser ◽

Average Power ◽

High Average Power ◽

Krf Excimer Laser

Download Full-text

Studies on high repetition rate and long life electron beam pumped KrF excimer laser.

The Review of Laser Engineering ◽

10.2184/lsj.16.23 ◽

1988 ◽

Vol 16 (1) ◽

pp. 23-29

Author(s):

Yoshiyuki KAWAMURA ◽

Koichi TOYODA

Keyword(s):

Electron Beam ◽

Excimer Laser ◽

Repetition Rate ◽

High Repetition Rate ◽

High Repetition ◽

Long Life ◽

Krf Excimer Laser

Download Full-text

Dependence on repetition rate in post-laser annealing process of ion-implanted ZnO nanorods using KrF excimer laser

2013 Conference on Lasers and Electro-Optics Pacific Rim (CLEOPR) ◽

10.1109/cleopr.2013.6600321 ◽

2013 ◽

Author(s):

T. Shimogaki ◽

T. Ofuji ◽

M. Higashihata ◽

H. Ikenoue ◽

D. Nakamura ◽

...

Keyword(s):

Excimer Laser ◽

Repetition Rate ◽

Laser Annealing ◽

Zno Nanorods ◽

Annealing Process ◽

Krf Excimer Laser ◽

Download Full-text