Scheduling of time constrained dual-arm cluster tools with wafer revisiting

2013 IEEE International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2013.6653916 ◽

2013 ◽

Author(s):

Yan Qiao ◽

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Cluster Tools ◽

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A Closed-Form Solution for Schedulability and Optimal Scheduling of Dual-Arm Cluster Tools With Wafer Residency Time Constraint Based on Steady Schedule Analysis

IEEE Transactions on Automation Science and Engineering ◽

10.1109/tase.2008.2008633 ◽

2010 ◽

Vol 7 (2) ◽

pp. 303-315 ◽

Author(s):

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Closed Form ◽

Closed Form Solution ◽

Form Solution ◽

Time Constraint ◽

Optimal Scheduling ◽

Cluster Tools ◽

Dual Arm ◽

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Modeling, Analysis and Control of Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation Based on Petri Nets

IEEE Transactions on Automation Science and Engineering ◽

10.1109/tase.2011.2178023 ◽

2012 ◽

Vol 9 (2) ◽

pp. 446-454 ◽

Author(s):

Nai Qi Wu ◽

MengChu Zhou

Keyword(s):

Time Variation ◽

Time Constraint ◽

Activity Time ◽

Modeling Analysis ◽

Cluster Tools ◽

And Control ◽

Dual Arm ◽

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Schedulability and Scheduling Analysis of Dual-Arm Cluster Tools with Wafer Revisiting and Residency Time Constraints Based on a Novel Schedule

IEEE Transactions on Systems Man and Cybernetics Systems ◽

10.1109/tsmc.2014.2347928 ◽

2015 ◽

Vol 45 (3) ◽

pp. 472-484 ◽

Author(s):

Yan Qiao ◽

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Time Constraints ◽

Scheduling Analysis ◽

Cluster Tools ◽

Dual Arm ◽

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A Petri-Net-Based Scheduling Strategy for Dual-Arm Cluster Tools With Wafer Revisiting

IEEE Transactions on Systems Man and Cybernetics Systems ◽

10.1109/tsmca.2012.2230440 ◽

2013 ◽

Vol 43 (5) ◽

pp. 1182-1194 ◽

Author(s):

NaiQi Wu ◽

MengChu Zhou ◽

Feng Chu ◽

Chengbin Chu

Keyword(s):

Petri Net ◽

Scheduling Strategy ◽

Cluster Tools ◽

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(Digital twin) Wafer sojourn time fluctuation analysis for time-constrained dual-arm multi-cluster tools with activity time variation

International Journal of Computer Integrated Manufacturing ◽

10.1080/0951192x.2020.1718767 ◽

2020 ◽

pp. 1-17

Author(s):

Fajun Yang ◽

Naiqi Wu ◽

Yan Qiao ◽

Rong Su ◽

Chunjiang Zhang

Keyword(s):

Time Variation ◽

Sojourn Time ◽

Fluctuation Analysis ◽

Activity Time ◽

Digital Twin ◽

Cluster Tools ◽

Time Fluctuation ◽

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Petri net-based scheduling analysis of dual-arm cluster tools with wafer revisiting

2012 IEEE International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2012.6386329 ◽

2012 ◽

Author(s):

Yan Qiao ◽

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Petri Net ◽

Scheduling Analysis ◽

Cluster Tools ◽

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Schedulability and Scheduling of Dual-Arm Cluster Tools with Residency Time Constraints Based on Petri Net

2006 IEEE International Conference on Automation Science and Engineering ◽

10.1109/coase.2006.326860 ◽

2006 ◽

Author(s):

Naiqi Wu ◽

Mengchu Zhou

Keyword(s):

Petri Net ◽

Time Constraints ◽

Cluster Tools ◽

Dual Arm ◽

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Petri Net Modeling and Cycle-Time Analysis of Dual-Arm Cluster Tools With Wafer Revisiting

IEEE Transactions on Systems Man and Cybernetics Systems ◽

10.1109/tsmca.2012.2187890 ◽

2013 ◽

Vol 43 (1) ◽

pp. 196-207 ◽

Author(s):

NaiQi Wu ◽

Feng Chu ◽

Chengbin Chu ◽

MengChu Zhou

Keyword(s):

Petri Net ◽

Time Analysis ◽

Cluster Tools ◽

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Scheduling dual-arm cluster tools with multiple wafer types and residency time constraints

IEEE/CAA Journal of Automatica Sinica ◽

10.1109/jas.2020.1003150 ◽

2020 ◽

Vol 7 (3) ◽

pp. 776-789 ◽

Author(s):

Jipeng Wang ◽

Hesuan Hu ◽

Chunrong Pan ◽

Yuan Zhou ◽

Liang Li

Keyword(s):

Time Constraints ◽

Cluster Tools ◽

Dual Arm ◽

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Simulation modeling and visualization of start-up transient processes of dual-arm cluster tools with wafer revisiting

2014 IEEE International Conference on Systems, Man, and Cybernetics (SMC) ◽

10.1109/smc.2014.6973896 ◽

2014 ◽

Author(s):

ChunRong Pan ◽

MengChu Zhou ◽

Yan Qiao ◽

NaiQi Wu

Keyword(s):

Simulation Modeling ◽

Transient Processes ◽

Start Up ◽

Cluster Tools ◽

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