Electrical characterization of the subthreshold damage in ion implanted p-type silicon
2003 ◽
Vol 18
(6)
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pp. 554-559
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2005 ◽
Vol 14
(8)
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pp. 1297-1301
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2008 ◽
Vol 158
(21-24)
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pp. 821-825
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Keyword(s):
Keyword(s):
1993 ◽
Vol 143-147
◽
pp. 1475-1480
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2007 ◽
Vol 390
(1-2)
◽
pp. 151-154
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Keyword(s):