scholarly journals Fast temperature sensing for GaN power devices using E-field probes

Author(s):  
Mohammad H. Hedayati ◽  
Harry C. P. Dymond ◽  
Dawei Liu ◽  
Bernard H. Stark
Author(s):  
Jianjing Wang ◽  
Mohammad H. Hedayati ◽  
Dawei Liu ◽  
Salah-Eddine Adami ◽  
Harry C. P. Dymond ◽  
...  

1997 ◽  
Vol 503 ◽  
Author(s):  
Yongxia Zhang ◽  
Yanwei Zhang ◽  
Juliana Blaser ◽  
T. S. Sriiram ◽  
R. B. Marcus

ABSTRACTA thermal microprobe has been designed and built for high resolution temperature sensing. The thermal sensor is a thin-film thermocouple junction at the tip of an Atomic Force Microprobe (AFM) silicon probe needle. Only wafer-stage processing steps are used for the fabrication. The thermal response over the range 25–s 4.5–rovolts per degree C and is linear.


2020 ◽  
Vol 13 (12) ◽  
pp. 120101
Author(s):  
Tsunenobu Kimoto ◽  
Heiji Watanabe

Sign in / Sign up

Export Citation Format

Share Document