Hybrid Variable Capacitor in Impedance Matcher for RF Plasma Process

Author(s):  
Juhwa Min ◽  
Yongsug Suh
1987 ◽  
Vol 98 ◽  
Author(s):  
Aaron J. Becker ◽  
Thomas N. Meyer ◽  
Frances N. Smith ◽  
Jon F. Edd

ABSTRACTAn iterative technique to develop plasma processing, consisting of identifying materials with unique properties, calculating conversion efficiencies, product purity and power from thermodynamic data for the chemical reactions selected to produce it and modeling the process mathematically and physically to determine capital and labor costs is illustrated with production of silicon carbide and titanium diboride in Alcoa's DC plasma facility. The work shows that submicron silicon carbide and titanium diboride containing less than 0.2% oxygen can be produced with plasmas at costs competitive with traditional processes. It has also been reported that aluminum nitride, a material which has the high thermal conductivity needed for high power electronic substrates, can be satisfactorily produced by reacting aluminum powder with nitrogen in an RF plasma system. Future application of plasmas for production of ceramics will depend on discovery of unique properties and cost effective process optimization.


2019 ◽  
Vol 70 (03) ◽  
pp. 205-210
Author(s):  
RALUCA MARIA AILENI ◽  
RAZVAN ION RADULESCU ◽  
LAURA CHIRIAC ◽  
LILIOARA SURDU

This paper presents aspects concerning the life cycle assessment of the electroconductive textile functionalized by advanced RF plasma technology based on argon and oxygen gases and deposition of the metallic micro/nanoparticles. In order to obtain the textiles with electroconductive properties, the preliminary plan consisted functionalization of the textiles by using RF plasma technology based on argon and oxygen gases and processes for micro/nanoparticles deposition such as foulard, direct printing, and thin film position. It was analyzed the life-cycle inventory (LCI) and was provided the study for life-cycle assessment (LCA) using SimaPro software and Eco-indicator 99. In order to obtain the LCI, we used to input and output technical data, from the plasma process, and the SimaPro software for generating the LCI and LCA. The input data about raw material, energy, chemical substances, have been collected by direct measurements on machinery, device log, and specifications of the equipment (technical books) and processes. The output data was obtained using SimaPro software connected to internet-specific databases. The purpose of our research has been to study the life cycle assessment of the electroconductive textiles functionalized by RF plasma technology in comparison with classical functionalization treatments.


2014 ◽  
Vol 61 (2) ◽  
pp. 445-451 ◽  
Author(s):  
Pouya Dianat ◽  
Richard Prusak ◽  
Anna Persano ◽  
Adriano Cola ◽  
Fabio Quaranta ◽  
...  

2006 ◽  
Vol 8 (3-4) ◽  
pp. 395-403 ◽  
Author(s):  
Nobuki Kashihara ◽  
Heru Setyawan ◽  
Manabu Shimada ◽  
Yutaka Hayashi ◽  
Chan Soo Kim ◽  
...  

2010 ◽  
Vol 204 (18-19) ◽  
pp. 3091-3095 ◽  
Author(s):  
Kattareeya Taweesub ◽  
Patama Visuttipitukul ◽  
Sukkaneste Tungkasmita ◽  
Boonchoat Paosawatyanyong
Keyword(s):  

2020 ◽  
Vol 20 (6) ◽  
pp. 1562-1572
Author(s):  
Juhwa Min ◽  
Beomseok Chae ◽  
Yongsug Suh ◽  
Jinho Kim ◽  
Hyunbae Kim

Author(s):  
A. Soric ◽  
S. Rousseau ◽  
M. Benmansour ◽  
Daniel Morvan ◽  
Jacques Amouroux

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