Back-end-of-Line (BEOL) Mechanical Integrity Evaluation: A Mixed-Mode Double Cantilever Beam Test for Crackstop Strength Assessment

Author(s):  
Max Cioban ◽  
Tuhin Sinha ◽  
Thomas M. Shaw

2018 ◽  
Vol 84 ◽  
pp. 420-430 ◽  
Author(s):  
Mahfoudh Taleb Ali ◽  
Julien Jumel ◽  
Martin E.R. Shanahan








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