Simultaneous doping / etching (SDE) process of multilayer graphene on Ni for low resistance metallization

Author(s):  
Kosuke Yokosawa ◽  
Tomoki Akimoto ◽  
Yuri Okada ◽  
Kazuyoshi Ueno
2014 ◽  
Vol 53 (5S2) ◽  
pp. 05GC02 ◽  
Author(s):  
Kazuyoshi Ueno ◽  
Ryosuke Kosugi ◽  
Kazuya Imazeki ◽  
Akihiko Aozasa ◽  
Yuji Matsumoto ◽  
...  

1984 ◽  
Vol 20 (22) ◽  
pp. 942
Author(s):  
K. Ismail ◽  
H. Beneking
Keyword(s):  

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