Numerical Modelling of Ferromagnetic Enhanced Inductively Coupled Plasma Discharge Parameters in Oxygen
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1989 ◽
Vol 44
(7)
◽
pp. 657-666
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1990 ◽
Vol 45
(8)
◽
pp. 951-953
2005 ◽
Vol 7
(6)
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pp. 3117-3121
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