Lithium Niobate Film Bulk Longitudinal Wave Resonator

2021 ◽  
Author(s):  
A. Reinhardt ◽  
M. Bousquet ◽  
A. Joulie ◽  
C.-L. Hsu ◽  
F. Delaguillaumie ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
Longitudinal Wave ◽  
Wave Resonator ◽  
Film Bulk

scholarly journals The thin film bulk acoustic wave resonator based on single-crystalline 43○Y-cut lithium niobate thin films

AIP Advances ◽  
2020 ◽  
Vol 10 (7) ◽  
pp. 075002
Author(s):  
Xiaoyuan Bai ◽  
Yao Shuai ◽  
Lu Lv ◽  
Ying Xing ◽  
Jiaoling Zhao ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Lithium Niobate ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Single Crystalline ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Film Bulk

Lithium niobate film bulk acoustic wave resonator for sub-6 GHz filters

2020 ◽  
Author(s):  
Marie Bousquet ◽  
Pierre Perreau ◽  
Catherine Maeder-Pachurka ◽  
Alice Joulie ◽  
Fanny Delaguillaumie ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Film Bulk

scholarly journals 3D Simulation-Based Acoustic Wave Resonator Analysis and Validation Using Novel Finite Element Method Software

Sensors ◽  
2021 ◽  
Vol 21 (8) ◽  
pp. 2715
Author(s):  
Ruth Yadira Vidana Morales ◽  
Susana Ortega Cisneros ◽  
Jose Rodrigo Camacho Perez ◽  
Federico Sandoval Ibarra ◽  
Ricardo Casas Carrillo
Keyword(s):  
Finite Element ◽  
High Performance ◽  
Cloud Services ◽  
3D Simulation ◽  
3D Simulations ◽  
Acoustic Resonators ◽  
Analysis And Design ◽  
Wave Resonator ◽  
Film Bulk ◽  
Simulation Results

This work illustrates the analysis of Film Bulk Acoustic Resonators (FBAR) using 3D Finite Element (FEM) simulations with the software OnScale in order to predict and improve resonator performance and quality before manufacturing. This kind of analysis minimizes manufacturing cycles by reducing design time with 3D simulations running on High-Performance Computing (HPC) cloud services. It also enables the identification of manufacturing effects on device performance. The simulation results are compared and validated with a manufactured FBAR device, previously reported, to further highlight the usefulness and advantages of the 3D simulations-based design process. In the 3D simulation results, some analysis challenges, like boundary condition definitions, mesh tuning, loss source tracing, and device quality estimations, were studied. Hence, it is possible to highlight that modern FEM solvers, like OnScale enable unprecedented FBAR analysis and design optimization.

scholarly journals Dual functionality metamaterial enables ultra-compact, highly sensitive uncooled infrared sensor

Nanophotonics ◽  
2021 ◽  
Vol 10 (4) ◽  
pp. 1337-1346
Author(s):  
Jin Tao ◽  
Zhongzhu Liang ◽  
Guang Zeng ◽  
Dejia Meng ◽  
David R. Smith ◽  
...  
Keyword(s):  
High Sensitivity ◽  
Metamaterial Absorber ◽  
Bulk Acoustic Wave ◽  
Infrared Sensors ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Highly Sensitive ◽  
Film Bulk ◽  
Perfect Metamaterial Absorber ◽  
High Absorption

Abstract Cointegration and coupling a perfect metamaterial absorber (PMA) together with a film bulk acoustic wave resonator (FBAR) in a monolithic fashion is introduced for the purpose of producing ultracompact uncooled infrared sensors of high sensitivity. An optimized ultrathin multilayer stack was implemented to realize the proposed device. It is experimentally demonstrated that the resonance frequency of the FBAR can be used efficiently as a sensor output as it downshifts linearly with the intensity of the incident infrared irradiation. The resulting sensor also achieves a high absorption of 88% for an infrared spectrum centered at a wavelength of 8.2 μm. The structure is compact and can be easily integrated on a CMOS-compatible chip since both the FBAR and PMA utilize and share the same stack of metal and dielectric layers.

Simulation and fabrication of thin film bulk acoustic wave resonator

2016 ◽  
Vol 37 (7) ◽  
pp. 074009
Author(s):  
Xixi Han ◽  
Yi Ou ◽  
Zhigang Li ◽  
Wen Ou ◽  
Dapeng Chen ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Film Bulk

Wideband double-mode bulk acoustic wave resonator filters on lithium niobate using periodically slotted electrodes

2021 ◽  
Author(s):  
Ting Wu ◽  
Yu-Po Wong ◽  
Yiwen He ◽  
Jing-Fu Bao ◽  
Ken-ya Hashimoto
Keyword(s):  
Lithium Niobate ◽  
Frequency Separation ◽  
Bulk Acoustic Wave ◽  
3D Analysis ◽  
Transverse Modes ◽  
Resonance Modes ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Piston Mode ◽  
Resonator Filters

Abstract Abstract: This paper discusses applicability of periodically slotted electrodes for realization of wideband transversely-coupled double-mode resonator filters using lithium niobate (LN) thin plate. First, two-dimensional analysis is carried out, and it is shown that the periodic structure is effective to control the frequency separation between two resonance modes, and synthesis of the fractional bandwidth larger than 24% is achievable. Next, 3D analysis is performed for suppression of spurious resonances. It is shown that the mass loading at aperture edges is effective for the piston mode operation, and transverse modes can be well suppressed. It is also pointed out that the bottom electrode should be covered only the aperture region and removed from the busbar and gap regions for suppression of unwanted resonances. With these proper edge treatments, spurious-free and wide passband can be synthesized.

Thin film bulk acoustic wave resonator (TFBAR) gas sensor

2005 ◽  
Author(s):  
M. Benetti ◽  
D. Cannat ◽  
A. D'Amico ◽  
F. Di Pietrantonio ◽  
V. Foglietti ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Gas Sensor ◽  
Bulk Acoustic Wave ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Film Bulk

scholarly journals Extraction of lateral eigenmode properties in thin film bulk acoustic wave resonator from interferometric measurements

2010 ◽  
Vol 96 (17) ◽  
pp. 173502 ◽  
Author(s):  
Kimmo Kokkonen ◽  
Tuomas Pensala ◽  
Johanna Meltaus ◽  
Matti Kaivola
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator ◽  
Film Bulk
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