Wideband double-mode bulk acoustic wave resonator filters on lithium niobate using periodically slotted electrodes

Abstract: This paper discusses applicability of periodically slotted electrodes for realization of wideband transversely-coupled double-mode resonator filters using lithium niobate (LN) thin plate. First, two-dimensional analysis is carried out, and it is shown that the periodic structure is effective to control the frequency separation between two resonance modes, and synthesis of the fractional bandwidth larger than 24% is achievable. Next, 3D analysis is performed for suppression of spurious resonances. It is shown that the mass loading at aperture edges is effective for the piston mode operation, and transverse modes can be well suppressed. It is also pointed out that the bottom electrode should be covered only the aperture region and removed from the busbar and gap regions for suppression of unwanted resonances. With these proper edge treatments, spurious-free and wide passband can be synthesized.

Influence of displacement and patterning of phase shifters for piston mode operation of temperature compensated surface acoustic wave resonators on SiO2/LiNbO3 structure

This paper discusses influence of displacement and patterning of phase shifters for piston mode operation of the temperature compensated (TC) surface acoustic wave (SAW) resonator on SiO2/LiNbO3 structure. As the phase shifters, Cu metals placed on the top surface of SiO2 are considered. First, the conventional Cu stripes are chosen, and their displacement are considered from IDT aperture edges. It is shown that achievable transverse mode suppression is almost identical when the stripe shape is adjusted for each case. Next, Cu dots are considered as patterned phase shifters. It is shown comparable transverse mode suppression is possible also for this case. However, relatively strong SAW lateral leakage occurs when they are placed above IDT fingers. These results indicate that location and pattern can be added as design parameters for the phase shifters on SiO2. It is favorable for further enhancement of total device performances.

Spurious free thickness shear bulk acoustic resonators on lithium niobate using standard and broadband piston mode designs

This paper describes design and fabrication of sprious-free thickness shear bulk acoustic resonators (TSBARs) using the lithium niobate (LN) plate. Previously, the authors conjected from the experiment on the TSBAR that cutoff edges with crystal LN X-plane serve as ideal reflectors for the piston mode operation, and complete suppression is possible by adding the standard piston mode design to the other edges normal to the X-axis. Following to this conjecture, the traditional piston mode structure is designed by the traditional two-dimensional finite element method, and the TSBAR is fabricated following to the design. The experiment showed complete suppression of the transverse mode resonances, and the conjecture was verified.

Study on Direct Writing of Gallium Metal for the Flexible Sensor

There is an urgent need for a simple and effective method to manufacture flexible sensors composed of liquid metal. Gallium (Ga) metal has become an ideal flexible conductive material due to its high conductivity, low melting point, and high flow characteristics. In this paper, liquid Ga metal is directly written on the polyvinyl alcohol (PVA) film through the driving mode of piston extrusion; then, the Ga metal wire is transferred and sealed with silica gel. The advantages of piston mode are studied, and the direct writing parameters of the liquid Ga metal, including extrusion speed, nozzle height, printing speed, and nozzle inner diameter, are systematically optimized. The flexible sensor based on the sealed liquid Ga metal has good resilience under the external load. This work provides a specific reference for direct writing of liquid Ga metal and its sealing technology for the flexible sensor.