Luminescent Silicon Oxycarbide Thin Films via Hot-wire CVD using Tetraethyl Orthosilicate: Role of the Chamber Pressure and Post-deposition Annealing
Keyword(s):
Hot Wire
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2017 ◽
Vol 30
(1)
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pp. 1-5
Keyword(s):
2011 ◽
Vol 59
(5)
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pp. 3093-3096
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2019 ◽
Vol 29
(5)
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pp. 1-5
2019 ◽
Vol 103
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pp. 104615
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Keyword(s):
Keyword(s):