Identifying significant features for neural network-based particle contamination prediction in plasma etching process
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1994 ◽
Vol 7
(3)
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pp. 333-344
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2000 ◽
Vol 43
(3)
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pp. 594-602
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1999 ◽
Vol 28
(4)
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pp. 347-354
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2008 ◽
Vol 53
(9(4))
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pp. 2270-2274