Basic Study on Analysis and Suppression of Inverse Response Caused by Feedforward Friction Compensation of Ball-screw-driven Stage

2021 ◽  
Author(s):  
Takumi Hayashi ◽  
Hiroshi Fujimoto ◽  
Yoshihiro Isaoka ◽  
Yuki Terada
Keyword(s):  
Ball Screw ◽  
Friction Compensation ◽  
Basic Study ◽  
Inverse Response

Development of Precision Positioning Stage

2019 ◽  
Vol 18 (01) ◽  
pp. 103-111
Author(s):  
Prabha Niranjan ◽  
Shashikantha Karinka ◽  
KVSSSS Sairam
Keyword(s):  
High Speed ◽  
Ball Screw ◽  
Friction Compensation ◽  
Programmable Logic ◽  
Precision Positioning ◽  
Positioning Accuracy ◽  
High Productivity ◽  
Productivity Gain ◽  
Positioning Stage ◽  
Machine Interface

The growing demand for positioning accuracy in machines with high speed plays an important role in achieving high productivity gain. A system that is capable to achieve both coarse (macro) and fine (micro) positioning finds a variety of applications in precision positioning. In the proposed work, a macro positioning stage is developed with a ball screw actuator and a micro positioning stage is developed with an additional gear reduction unit. The coarse and fine positioning with friction compensation is achieved and the steady state error is minimized. The developed system is controlled using a programmable logic controller and operated with human machine interface.

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