A Microelectronic Test Structure For Thickness Determination Of Homogeneous Conducting Thin Films In VLSI Processing

2005 ◽  
Author(s):  
J.S. Kim ◽  
L.W. Linholm ◽  
B.L. Barley ◽  
M.H. Hanes ◽  
M.W. Cresswell
Keyword(s):  
Thin Films ◽  
Test Structure ◽  
Thickness Determination

scholarly journals New Approach for Thickness Determination of Solution-Deposited Graphene Thin Films

ACS Omega ◽  
2017 ◽  
Vol 2 (6) ◽  
pp. 2630-2638 ◽  
Author(s):  
Henri Jussila ◽  
Tom Albrow-Owen ◽  
He Yang ◽  
Guohua Hu ◽  
Sinan Aksimsek ◽  
...  
Keyword(s):  
Thin Films ◽  
New Approach ◽  
Thickness Determination

Bulk-Micromachined Test Structure for Fast and Reliable Determination of the Lateral Thermal Conductivity of Thin Films

2007 ◽  
Vol 16 (3) ◽  
pp. 675-683 ◽  
Author(s):  
Luigi La Spina ◽  
Alexander W. van Herwaarden ◽  
Hugo Schellevis ◽  
Wim H. A. Wien ◽  
Neboja Nenadovic ◽  
...  
Keyword(s):  
Thin Films ◽  
Thermal Conductivity ◽  
Test Structure ◽  
Reliable Determination ◽  
Conductivity Of Thin Films

Thickness determination of SrZrO3 thin films using both X-ray reflectometry and SIMS techniques

2008 ◽  
Vol 516 (22) ◽  
pp. 7967-7973 ◽  
Author(s):  
K. Galicka-Fau ◽  
C. Legros ◽  
M. Andrieux ◽  
M. Herbst-Ghysel ◽  
I. Gallet ◽  
...  
Keyword(s):  
Thin Films ◽  
X Ray ◽  
Thickness Determination
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