Circular test structure for the determination of piezoelectric constants of Sc x Al 1−x N thin films applying Laser Doppler Vibrometry and FEM simulations
2015 ◽
Vol 222
◽
pp. 301-308
◽
Keyword(s):
2021 ◽
2014 ◽
Vol 363
◽
pp. 179-187
◽
2007 ◽
Vol 16
(3)
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pp. 675-683
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Keyword(s):
1990 ◽
Vol 88
(S1)
◽
pp. S22-S22
Keyword(s):
1976 ◽
Vol 34
◽
pp. 638-639