SOI CMOS compatible low-power microheater optimization and fabrication for smart gas sensor implementations

2003 ◽  
Author(s):  
J. Laconte ◽  
C. Dupont ◽  
D. Flandre ◽  
J.-P. Raskin
Keyword(s):  
Low Power ◽  
Gas Sensor ◽  
Cmos Compatible ◽  
Soi Cmos

SOI-CMOS compatible low-power gas sensor using sputtered and drop-coated metal-oxide active layers

2005 ◽  
Vol 12 (1-2) ◽  
pp. 160-168 ◽  
Author(s):  
P. Ivanov ◽  
J. Laconte ◽  
J. P. Raskin ◽  
M. Stankova ◽  
E. Sotter ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Low Power ◽  
Gas Sensor ◽  
Active Layers ◽  
Coated Metal ◽  
Cmos Compatible ◽  
Soi Cmos

A low-power CMOS compatible integrated gas sensor using maskless tin oxide sputtering

1998 ◽  
Vol 49 (1-2) ◽  
pp. 81-87 ◽  
Author(s):  
Lie-yi Sheng ◽  
Zhenan Tang ◽  
Jian Wu ◽  
Philip C.H. Chan ◽  
Johnny K.O. Sin
Keyword(s):  
Low Power ◽  
Gas Sensor ◽  
Tin Oxide ◽  
Low Power Cmos ◽  
Cmos Compatible

SOI CMOS Compatible Low-Power Microheater Optimization for the Fabrication of Smart Gas Sensors

2004 ◽  
Vol 4 (5) ◽  
pp. 670-680 ◽  
Author(s):  
J. Laconte ◽  
C. Dupont ◽  
D. Flandre ◽  
J.-P. Raskin
Keyword(s):  
Low Power ◽  
Gas Sensors ◽  
Cmos Compatible ◽  
Soi Cmos

Novel ultra-low power RF Lateral BJT on SOI-CMOS compatible substrate for SoC Applications

2006 ◽  
Author(s):  
I.-S.M. Sun ◽  
W.T. Ng ◽  
H. Mochizuki ◽  
K. Kanekiyo ◽  
T. Kobayashi ◽  
...  
Keyword(s):  
Low Power ◽  
Ultra Low Power ◽  
Cmos Compatible ◽  
Soi Cmos

Research of Low-Power MEMS-based Micro hotplates Gas Sensor: A Review

2021 ◽  
pp. 1-1
Author(s):  
Zhenyu Yuan ◽  
Fan Yang ◽  
Fanli Meng ◽  
Kaiyuan Zuo ◽  
Jin Li
Keyword(s):  
Low Power ◽  
Gas Sensor ◽  
Power Mems
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