Deep NLD plasma etching of Fused Silica and Borosilicate Glass

2013 ◽  
Author(s):  
Mohammed J. Ahamed ◽  
Doruk Senkal ◽  
Alexander A. Trusov ◽  
Andrei M. Shkel
Keyword(s):  
Plasma Etching ◽  
Borosilicate Glass ◽  
Fused Silica

scholarly journals Study of High Aspect Ratio NLD Plasma Etching and Postprocessing of Fused Silica and Borosilicate Glass

2015 ◽  
Vol 24 (4) ◽  
pp. 790-800 ◽  
Author(s):  
Mohammed J. Ahamed ◽  
Doruk Senkal ◽  
Alexander A. Trusov ◽  
Andrei M. Shkel
Keyword(s):  
Aspect Ratio ◽  
Plasma Etching ◽  
Borosilicate Glass ◽  
High Aspect Ratio ◽  
Fused Silica

scholarly journals Argon plasma etching of fused silica substrates for manufacturing high laser damage resistance optical interference coatings

2017 ◽  
Vol 7 (10) ◽  
pp. 3598 ◽  
Author(s):  
Kęstutis Juškevičius ◽  
Rytis Buzelis ◽  
Giedrius Abromavičius ◽  
Romanas Samuilovas ◽  
Saulė Abbas ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Argon Plasma ◽  
Fused Silica ◽  
Laser Damage ◽  
Optical Interference ◽  
Damage Resistance ◽  
High Laser ◽  
Silica Substrates

Deep wet etching of borosilicate glass and fused silica with dehydrated AZ4330 and a Cr/Au mask

2013 ◽  
Vol 24 (1) ◽  
pp. 015003 ◽  
Author(s):  
Joo-Young Jin ◽  
Sunghyun Yoo ◽  
Jae-Sung Bae ◽  
Yong-Kweon Kim
Keyword(s):  
Borosilicate Glass ◽  
Fused Silica ◽  
Wet Etching

scholarly journals Laser-induced gas plasma etching of fused silica under ambient conditions

2012 ◽  
Author(s):  
Selim Elhadj ◽  
Gabe Guss ◽  
Manyalibo J. Matthews ◽  
Isaac Bass
Keyword(s):  
Plasma Etching ◽  
Fused Silica ◽  
Ambient Conditions ◽  
Gas Plasma

scholarly journals Rapid Plasma Etching for Fabricating Fused Silica Microchannels

2017 ◽  
Vol 33 (12) ◽  
pp. 1453-1456 ◽  
Author(s):  
Kyojiro MORIKAWA ◽  
Kazuki MATSUSHITA ◽  
Takehiko TSUKAHARA
Keyword(s):  
Plasma Etching ◽  
Fused Silica

Surface modification and etch process optimization of fused silica during reaction CHF3–Ar plasma etching

Optik ◽  
2016 ◽  
Vol 127 (1) ◽  
pp. 206-211 ◽  
Author(s):  
Laixi Sun ◽  
Huang Jin ◽  
Xin Ye ◽  
Hongjie Liu ◽  
Fengrui Wang ◽  
...  
Keyword(s):  
Surface Modification ◽  
Process Optimization ◽  
Plasma Etching ◽  
Fused Silica ◽  
Ar Plasma
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