Density-viscosity sensor based on piezoelectric MEMS resonator and oscillator circuit

2014 ◽  
Author(s):  
Tomas Manzaneque ◽  
Victor Ruiz-Diez ◽  
Jorge Hernando-Garcia ◽  
Elisabeth Wistrela ◽  
Martin Kucera ◽  
...  
Keyword(s):  
Oscillator Circuit ◽  
Mems Resonator ◽  
Piezoelectric Mems ◽  
Viscosity Sensor

Piezoelectric MEMS resonator-based oscillator for density and viscosity sensing

2014 ◽  
Vol 220 ◽  
pp. 305-315 ◽  
Author(s):  
Tomás Manzaneque ◽  
Víctor Ruiz-Díez ◽  
Jorge Hernando-García ◽  
Elisabeth Wistrela ◽  
Martin Kucera ◽  
...  
Keyword(s):  
Mems Resonator ◽  
Piezoelectric Mems ◽  
Viscosity Sensing

scholarly journals System Optimization Methodology for Integrated Piezoelectric MEMS Resonator Biochemical Sensors

2012 ◽  
Vol 47 ◽  
pp. 635-638 ◽  
Author(s):  
L. Sieben-Xu ◽  
J. Pettine ◽  
V. Petrescu ◽  
M. Vandecasteele ◽  
D.M. Karabacak
Keyword(s):  
System Optimization ◽  
Biochemical Sensors ◽  
Mems Resonator ◽  
Piezoelectric Mems ◽  
Optimization Methodology

Quality factor improvement of piezoelectric MEMS resonator by the conjunction of frame structure and phononic crystals

2019 ◽  
Vol 297 ◽  
pp. 111541 ◽  
Author(s):  
Fei-Hong Bao ◽  
Jing-Fu Bao ◽  
Joshua En-Yuan Lee ◽  
Lei-Lei Bao ◽  
Muhammad Ammar Khan ◽  
...  
Keyword(s):  
Quality Factor ◽  
Phononic Crystals ◽  
Frame Structure ◽  
Mems Resonator ◽  
Piezoelectric Mems

A flexible, gigahertz, and free-standing thin film piezoelectric MEMS resonator with high figure of merit

2017 ◽  
Vol 111 (2) ◽  
pp. 023505 ◽  
Author(s):  
Yuan Jiang ◽  
Menglun Zhang ◽  
Xuexin Duan ◽  
Hao Zhang ◽  
Wei Pang
Keyword(s):  
Thin Film ◽  
Figure Of Merit ◽  
Free Standing ◽  
Mems Resonator ◽  
High Figure ◽  
Piezoelectric Mems
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