A flexible, gigahertz, and free-standing thin film piezoelectric MEMS resonator with high figure of merit
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1966 ◽
Vol 5
(2)
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pp. 145-159
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2008 ◽
Vol 136
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pp. 75-82
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2019 ◽
Vol 1
(6)
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pp. 1029-1037
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2019 ◽
Vol 770
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pp. 813-822
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