Automatic Compensation of Parallel Capacitance of TPoS MEMS Resonator for Accurate Frequency Tracking with PLL-Based Oscillator Circuit

2020 ◽  
pp. 273-278 ◽  
Author(s):  
M. Baù ◽  
M. Ferrari ◽  
V. Ferrari ◽  
A. Ali ◽  
J. E.-Y. Lee
Keyword(s):  
Automatic Compensation ◽  
Frequency Tracking ◽  
Oscillator Circuit ◽  
Mems Resonator

Analysis of a Natural Frequency Tracking System for MEMS Fatigue Testing

2001 ◽  
Author(s):  
Xiaotian Sun ◽  
Roberto Horowitz ◽  
Kyriakos Komvopoulos
Keyword(s):  
Control System ◽  
Natural Frequency ◽  
Averaging Method ◽  
Fatigue Testing ◽  
Tracking System ◽  
Frequency Tracking ◽  
At Resonance ◽  
Mems Resonator ◽  
Control Gain ◽  
Good Agreement

Abstract A nonlinear control system that can track the natural frequency of a MEMS resonator was developed in this study. Due to the evolution of fatigue damage, the natural frequency of the resonator decreases. To maintain the device at resonance, a phase-locked loop system is used to track the frequency decay and adjust the driving force accordingly. A model for the control system is introduced and the system behavior is analyzed using an averaging method. A quantitative criterion for selecting the control gain to achieve stability is derived from the analysis. Simulation results are shown to be in good agreement with the prediction of the theoretical analysis.

Density-viscosity sensor based on piezoelectric MEMS resonator and oscillator circuit

2014 ◽  
Author(s):  
Tomas Manzaneque ◽  
Victor Ruiz-Diez ◽  
Jorge Hernando-Garcia ◽  
Elisabeth Wistrela ◽  
Martin Kucera ◽  
...  
Keyword(s):  
Oscillator Circuit ◽  
Mems Resonator ◽  
Piezoelectric Mems ◽  
Viscosity Sensor

Read and Write Operations of Memory Device Consisting of Nonlinear MEMS Resonator

2014 ◽  
Vol 1 ◽  
pp. 352-355 ◽  
Author(s):  
Atsushi YAO ◽  
Takashi HIKIHARA
Keyword(s):  
Memory Device ◽  
Mems Resonator

Backside FIB Device Modifications Through the BOX Layer of an SOI Device

2002 ◽  
Author(s):  
Jeffery P. Huynh ◽  
Joseph P. Shannon ◽  
Richard W. Johnson ◽  
Mike Santana ◽  
Thomas Y. Chu ◽  
...  
Keyword(s):  
Contact Resistance ◽  
Oxide Layer ◽  
Cross Section ◽  
Test Structure ◽  
Ring Oscillator ◽  
Oscillator Circuit ◽  
Entire Process ◽  
Oscillator Frequency ◽  
Polysilicon Gate ◽  
Resistance Data

Abstract Modifications directly to a transistor’s source/drain and polysilicon gate through the backside of a SOI device were made. Contact resistance data was obtained by creating contacts through the buried oxide layer of a manufactured test structure. A ring oscillator circuit was modified and the shift in oscillator frequency was measured. Finally, cross section images of the FIB created contacts were presented in the paper to illustrate the entire process.

Automatic compensation method for beam drift in long-distance laser measurement

2020 ◽  
Vol 28 (11) ◽  
pp. 2393-2402
Author(s):  
Bin-he YANG ◽  
◽  
Yin-di CAI ◽  
Zhi-xiang WEN ◽  
Si-ying LING
Keyword(s):  
Compensation Method ◽  
Laser Measurement ◽  
Automatic Compensation ◽  
Long Distance

A zinc dioxide-on-silicon MEMS resonator for narrowband filtering

2014 ◽  
Author(s):  
Mortada Ossama ◽  
Blondy Pierre ◽  
Crunteanu Aurelian ◽  
Chatras Matthieu ◽  
Jean-Christophe Orlianges
Keyword(s):  
Mems Resonator
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