Probing anchor losses in AlN-on-Si contour mode MEMS resonators through laser Doppler vibrometry
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2017 ◽
Vol 64
(5)
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pp. 898-904
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2017 ◽
Vol 263
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pp. 188-197
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Vol 70
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pp. 1-10
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Vol 24
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pp. 1038-1042
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Vol 13
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2018 ◽
Vol 184
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