Experimental technology and characterization of self-aligned 0.1µm-gate-length low-temperature operation NMOS devices

1987 ◽  
Author(s):  
G.A. Sai-Halasz ◽  
M.R. Wordeman ◽  
D.P. Kern ◽  
E. Ganin ◽  
S. Rishton ◽  
...  
Keyword(s):  
Low Temperature ◽  
Gate Length ◽  
Experimental Technology

Design and experimental technology for 0.1-µm gate-length low-temperature operation FET's

1987 ◽  
Vol 8 (10) ◽  
pp. 463-466 ◽  
Author(s):  
G.A. Sai-Halasz ◽  
M.R. Wordeman ◽  
D.P. Kern ◽  
E. Ganin ◽  
S. Rishton ◽  
...  
Keyword(s):  
Low Temperature ◽  
Gate Length ◽  
Experimental Technology

DC Characterization of Different Advanced MOSFET Architectures

2011 ◽  
Vol 324 ◽  
pp. 407-410 ◽  
Author(s):  
Jalal Jomaah ◽  
Majida Fadlallah ◽  
Gerard Ghibaudo
Keyword(s):  
Low Temperature ◽  
Parameter Extraction ◽  
Gate Length ◽  
Double Gate ◽  
Extraction Techniques ◽  
Interaction Mechanisms ◽  
Dc Characterization

A review of recent results concerning the DC characterization of FD- and Double Gate SOI MOSFET’s and FinFETs in modern CMOS technologies is given. By proper extraction techniques, distinction between the different interaction mechanisms is done. Parameter extraction conducted at room and low temperature clearly indicates that the mobility is directly impacted by shrinking the gate length in sub 100nm architectures.

scholarly journals Low Temperature Characterization of Hole Mobility in Sub-14nm Gate Length Si0.7Ge0.3 Tri-Gate pMOSFETs

2017 ◽  
Vol 834 ◽  
pp. 012001
Author(s):  
R. Laviéville ◽  
C. Le Royer ◽  
S. Barraud ◽  
G. Ghibaudo
Keyword(s):  
Low Temperature ◽  
Hole Mobility ◽  
Gate Length

Characterization of Low Temperature SiNx Films for 3D/2.5D-IC TSV

2015 ◽  
Vol 135 (7) ◽  
pp. 733-738 ◽  
Author(s):  
Yasushi Kobayashi ◽  
Yoshihiro Nakata ◽  
Tomoji Nakamura ◽  
Mayumi B. Takeyama ◽  
Masaru Sato ◽  
...  
Keyword(s):  
Low Temperature

Low temperature acoustic characterization of PMN single crystal

2017 ◽  
Vol 122 (8) ◽  
pp. 084103 ◽  
Author(s):  
E. Smirnova ◽  
A. Sotnikov ◽  
S. Ktitorov ◽  
H. Schmidt
Keyword(s):  
Low Temperature ◽  
Single Crystal ◽  
Acoustic Characterization
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