Characterization of Low Temperature SiNx Films for 3D/2.5D-IC TSV

2015 ◽  
Vol 135 (7) ◽  
pp. 733-738 ◽  
Author(s):  
Yasushi Kobayashi ◽  
Yoshihiro Nakata ◽  
Tomoji Nakamura ◽  
Mayumi B. Takeyama ◽  
Masaru Sato ◽  
...  
Keyword(s):  
2017 ◽  
Vol 122 (8) ◽  
pp. 084103 ◽  
Author(s):  
E. Smirnova ◽  
A. Sotnikov ◽  
S. Ktitorov ◽  
H. Schmidt

2019 ◽  
Vol 220 (11) ◽  
pp. 1900123
Author(s):  
Shu‐Gui Zhang ◽  
Xiao‐Jie Ju ◽  
Xing‐Long Zhou ◽  
Xing‐Qun Pu ◽  
Han‐Yu Peng ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document