Characterization of Low Temperature SiNx Films for 3D/2.5D-IC TSV
2015 ◽
Vol 135
(7)
◽
pp. 733-738
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Keyword(s):
2010 ◽
Vol 31
(7)
◽
pp. 776-780
2000 ◽
Keyword(s):
Keyword(s):
1982 ◽
Vol 257
(10)
◽
pp. 5372-5379