Improvement of direct-tunneling gate leakage current in ultra-thin gate oxide CMOS with TiN gate electrode using non-doped selective epitaxial Si channel technique

2003 ◽  
Author(s):  
H.S. Momose ◽  
T. Ohguro ◽  
E. Morifuji ◽  
H. Sugaya ◽  
S. Nakamura ◽  
...  
Keyword(s):  
Leakage Current ◽  
Gate Oxide ◽  
Gate Leakage Current ◽  
Gate Leakage ◽  
Gate Electrode ◽  
Direct Tunneling ◽  
Thin Gate Oxide

Stress-induced high-field gate leakage current in ultra-thin gate oxide

2000 ◽  
Vol 44 (6) ◽  
pp. 977-980 ◽  
Author(s):  
Jianlin Wei ◽  
Lingfeng Mao ◽  
Mingzhen Xu ◽  
Changhua Tan ◽  
Xiaorong Duan
Keyword(s):  
Leakage Current ◽  
High Field ◽  
Gate Oxide ◽  
Gate Leakage Current ◽  
Gate Leakage ◽  
Thin Gate Oxide

Gate leakage current of NMOSFET with ultra-thin gate oxide

2012 ◽  
Vol 19 (11) ◽  
pp. 3105-3109
Author(s):  
Shi-gang Hu ◽  
Xiao-Feng Wu ◽  
Zai-fang Xi
Keyword(s):  
Leakage Current ◽  
Gate Oxide ◽  
Gate Leakage Current ◽  
Gate Leakage ◽  
Thin Gate Oxide

Study on the Oxide Trap Distribution in a Thin Gate Oxide from Random Telegraph Noise in the Drain Current and the Gate Leakage Current

2011 ◽  
Vol 58 (5(2)) ◽  
pp. 1518-1521 ◽  
Author(s):  
Heung-Jae Cho ◽  
Younghwan Son ◽  
Sanghoon Lee ◽  
Jong-Ho Lee ◽  
Byung-Gook Park ◽  
...  
Keyword(s):  
Leakage Current ◽  
Drain Current ◽  
Gate Oxide ◽  
Gate Leakage Current ◽  
Gate Leakage ◽  
Random Telegraph Noise ◽  
Telegraph Noise ◽  
Oxide Trap ◽  
Thin Gate Oxide

Direct-tunneling gate leakage current in double-gate and ultrathin body MOSFETs

2002 ◽  
Vol 49 (12) ◽  
pp. 2288-2295 ◽  
Author(s):  
Leland Chang ◽  
K.J. Yang ◽  
Yee-Chia Yeo ◽  
I. Polishchuk ◽  
Tsu-Jae King ◽  
...  
Keyword(s):  
Leakage Current ◽  
Double Gate ◽  
Gate Leakage Current ◽  
Gate Leakage ◽  
Direct Tunneling
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