High performance poly Si junctionless transistors with sub-5nm conformally doped layers by molecular monolayer doping and microwave incorporating CO2 laser annealing for 3D stacked ICs applications

2015 ◽  
Author(s):  
Yao-Jen Lee ◽  
Ta-Chun Cho ◽  
Po-Jung Sung ◽  
Kuo-Hsing Kao ◽  
Fu-Kuo Hsueh ◽  
...  
Keyword(s):  
Co2 Laser ◽  
High Performance ◽  
Laser Annealing ◽  
Junctionless Transistors

CO2 laser annealing of Ge core fibers with different core diameters

2021 ◽  
Vol 66 ◽  
pp. 102645
Author(s):  
Ziwen Zhao ◽  
Jianbo Zhang ◽  
Shaoye Wang ◽  
Yifan Du ◽  
Li Ren
Keyword(s):  
Co2 Laser ◽  
Laser Annealing

Low-hole concentration polycrystalline germanium by CO2 laser annealing for the fabrication of an enhancement-mode nMOSFET

2018 ◽  
Vol 11 (10) ◽  
pp. 101305 ◽  
Author(s):  
Hari Anand Kasirajan ◽  
Wen-Hsien Huang ◽  
Ming-Hsuan Kao ◽  
Hsing-Hsiang Wang ◽  
Jia-Min Shieh ◽  
...  
Keyword(s):  
Co2 Laser ◽  
Laser Annealing ◽  
Hole Concentration ◽  
Enhancement Mode

Pulsed excimer and CO2 laser annealing of ion‐implanted silicon

1985 ◽  
Vol 3 (4) ◽  
pp. 1836-1838 ◽  
Author(s):  
J. Narayan ◽  
R. B. James ◽  
O. W. Holland ◽  
M. J. Aziz
Keyword(s):  
Co2 Laser ◽  
Laser Annealing ◽  
Ion Implanted

Excimer laser annealing system for AMLCDs: a long laser pulse for high-performance, uniform, and stable TFT

2001 ◽  
Author(s):  
Christophe Prat ◽  
Dorian Zahorski ◽  
Youri Helen ◽  
Taieb Mohammed-Brahim ◽  
Olivier Bonnaud
Keyword(s):  
Laser Pulse ◽  
Excimer Laser ◽  
High Performance ◽  
Laser Annealing ◽  
Excimer Laser Annealing

Lateral Grain Growth of Amorphous Silicon Films With Wide Thickness Range by Blue Laser Annealing and Application to High Performance Poly-Si TFTs

2016 ◽  
Vol 37 (3) ◽  
pp. 291-294 ◽  
Author(s):  
Seonghyun Jin ◽  
Younwoo Choe ◽  
Suhui Lee ◽  
Tae-Woong Kim ◽  
Mallory Mativenga ◽  
...  
Keyword(s):  
Amorphous Silicon ◽  
Grain Growth ◽  
High Performance ◽  
Laser Annealing ◽  
Blue Laser ◽  
Silicon Films
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