Defects and gallium-contamination during focused ion beam micro machining

Author(s):  
C. Lehrer ◽  
L. Frey ◽  
S. Petersen ◽  
M. Mizutani ◽  
M. Takai ◽  
...  
2005 ◽  
Vol 03 (supp01) ◽  
pp. 223-228 ◽  
Author(s):  
WEN-CHANG HUNG ◽  
A. ADAWI ◽  
A. TAHRAOUI ◽  
A. G. CULLIS

In order to control light, different strategies have been applied by placing an optically active medium into a semiconductor resonator and certain applications such as LEDs and laser diodes have been commercialized for many years. The possibility of nanoscale optical applications has created great interesting for quantum nanostructure research. Recently, single photon emission has been an active area of quantum dot research. A quantum dot is place between distributed Bragg reflectors (DBRs) within a micro-pillar structure. In this study, we shall report on an active layer composed of an organic material instead of a semiconductor. The micro-pillar structure is fabricated by a focused ion beam (FIB) micro-machining technique. The ultimate target is to achieve a single molecule within the micro-pillar and therefore to enable single photon emission. Here, we demonstrate some results of the fabrication procedure of a 5 micron organic micro-pillar via the focused ion beam and some measurement results from this study. The JEOL 6500 dual column system equipped with both electron and ion beams enables us to observe the fabrication procedure during the milling process. Furthermore, the strategy of the FIB micro-machining method is reported as well.


CIRP Annals ◽  
2015 ◽  
Vol 64 (1) ◽  
pp. 523-526 ◽  
Author(s):  
Sung-Hoon Ahn ◽  
Hae-Sung Yoon ◽  
Ki-Hwan Jang ◽  
Eun-Seob Kim ◽  
Hyun-Taek Lee ◽  
...  

Vacuum ◽  
1993 ◽  
Vol 44 (3-4) ◽  
pp. 353-356 ◽  
Author(s):  
Richard J Young

2005 ◽  
Vol 04 (04) ◽  
pp. 767-772
Author(s):  
HIROYUKI HOSOKAWA ◽  
TAKESHI NAKAJIMA ◽  
KOJI SHIMOJIMA ◽  
MAMORU MABUCHI

The cemented carbides containing various microstructures were machined by scanning a 30 keV Ga + ion beam, with a nominal spot size of 300 nm and a current of 5300 pA, from side to side and up and down and a 100 μs pixel dwell time. In the coarse-grained cemented carbide, the surfaces of the WC phase parts were very smooth while those of the Co phase were rough. In the fine-grained cemented carbides, the surfaces were smoother on the whole and the irregularities were smaller compared with the coarse-grained cemented carbides. It is indicated that preparation of cemented carbide with finer WC grains, and decrease of the mean free path of Co phase are required for the FIB micro-machining to reduce surface irregularities.


2021 ◽  
Vol 11 (2) ◽  
pp. 338
Author(s):  
Abubakar I. Adamu ◽  
Yazhou Wang ◽  
Rodrigo Amezcua Correa ◽  
Ole Bang ◽  
Christos Markos

2013 ◽  
Vol 753-755 ◽  
pp. 2578-2581
Author(s):  
Yan Chen ◽  
Li Bao An ◽  
Xiao Xia Yang

Ultra-precision machining is used for many engineering applications where the traditional processes fail to work. Focused ion beam (FIB) technology is a very important part of the ultra-precision machining. It can realize the precise positioning, microscopic observation and micro machining. This paper introduces the FIB system and its application. FIB system contains ion source, focusing and scanning equipment and sample station. FIB technique has many unique and important functions. It is widely used in semiconductor device fabrication and circuit failure analysis. It can realize sample etching, imaging, thin film deposited, ion implantation and micromachining.


2005 ◽  
Vol 46 (10) ◽  
pp. 2295-2297 ◽  
Author(s):  
Hiroyuki Hosokawa ◽  
Takeshi Nakajima ◽  
Koji Shimojima ◽  
Mamoru Mabuchi

2006 ◽  
Vol 53 (2) ◽  
pp. 187-191
Author(s):  
Hiroyuki Hosokawa ◽  
Takeshi Nakajima ◽  
Koji Shimojima

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