Study of loading effect during development and etching process in photomask fabrication

2003 ◽  
Author(s):  
Ji-Hyeon Chai ◽  
Byung-Gook Kim ◽  
Chan-Uk Chun ◽  
Sung-Yong Cho ◽  
Sung-Woon Choi ◽  
...  
Keyword(s):  
Etching Process ◽  
Loading Effect

A Study of Loading Effect during Electron-Beam Exposure and Etching Process in Photomask Fabrication

1999 ◽  
Vol 38 (Part 1, No. 12B) ◽  
pp. 6981-6984
Author(s):  
Ji-Hyeon Choi ◽  
Byung-Gook Kim ◽  
Chan-Uk Jeon ◽  
Sung-Yong Cho ◽  
Seong-Woon Choi ◽  
...  
Keyword(s):  
Electron Beam ◽  
Etching Process ◽  
Loading Effect

Study of loading effect on dry etching process

2003 ◽  
Author(s):  
Shih-Ming Chang ◽  
Chih-Cheng C. Chin ◽  
Wen-Chuan Wang ◽  
Chi-Lun Lu ◽  
Sheng-Chi J. Chin ◽  
...  
Keyword(s):  
Dry Etching ◽  
Etching Process ◽  
Loading Effect

Loading Effect in the Channel Etching Process of Crystalline In-Ga-Zn-Oxide FETs

2018 ◽  
Author(s):  
R. Arasawa ◽  
S. Sasagawa ◽  
E. Takahashi ◽  
K. Tochibayashi ◽  
Y. Komatsu ◽  
...  
Keyword(s):  
Etching Process ◽  
Loading Effect

Sem Observations in Gastric Mucosa Exposed to Progressive Enzymatic Etching

1980 ◽  
Vol 38 ◽  
pp. 570-571
Author(s):  
C.A.E. Lemmi ◽  
D. Booth ◽  
G.E. Adomian
Keyword(s):  
Gastric Mucosa ◽  
Critical Point ◽  
Proteolytic Activity ◽  
Etching Process ◽  
Cellular Types

In order to enrich populations of homogeneous cellular types we dissociated gastric mucosa by enzymatic techniques. In addition, we used SEM to monitor the progressive etching of the mucosa. Two enzymes were tested: collagenase III with minimum proteolytic activity and Pronase with broader proteolytic effects. The gastric mucosa was exposed to the effect of the enzymes using everted stomach preparations. In this way the digestive action occured progressively from the lumen of the stomach toward the base of the glands. This “etching” process could be monitored conveniently by SEM. After incubation for periods varying from 30 to 210 minutes the tissues were stretched on dental wax, fixed in 2 % glutaralheyde, post-fixed in osmium, dehydrated, critical point dryed and coated with gold. A model MSM-5 “Mini-SEM” was used for observation. Gentle uncurling of the preparation before coating with gold produced fractures which revealed the structure of the gastric glandsin more detail.

Erratum: Dry etching process for fabrication of optoelectronic gratings in III-V substrates

1992 ◽  
Vol 28 (3) ◽  
pp. 338
Author(s):  
A.S. Gozdz ◽  
J.A. Shelburne ◽  
R.S. Robinson ◽  
C.C. Chang
Keyword(s):  
Dry Etching ◽  
Etching Process

scholarly journals Low-temperature smoothing method of scalloped DRIE trench by post-dry etching process based on SF6 plasma

2020 ◽  
Vol 8 (1) ◽  
Author(s):  
Jin Soo Park ◽  
Dong-Hyun Kang ◽  
Seung Min Kwak ◽  
Tae Song Kim ◽  
Jung Ho Park ◽  
...  
Keyword(s):  
Low Temperature ◽  
Dry Etching ◽  
Smoothing Method ◽  
Etching Process
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