Research and Development of the Deep Plasma-Chemical Silicon Etching Process for the Creation of a Silicon Element with a Vertical Profile

2020 ◽  
Author(s):  
Victor V. Kalugin ◽  
Elena S. Kochurina ◽  
M. N. Zariankin ◽  
A. S. Anchutin ◽  
Nyan Linn Phyo
Keyword(s):  
Research And Development ◽  
Vertical Profile ◽  
Etching Process ◽  
Silicon Etching ◽  
Plasma Chemical ◽  
The Creation

scholarly journals Plasma chemical silicon etching process*

2016 ◽  
Vol 122 ◽  
pp. 012028
Author(s):  
K V Rudenko ◽  
A V Miakonkih ◽  
A E Rogojin ◽  
S V Bogdanov ◽  
V G Sidorov ◽  
...  
Keyword(s):  
Etching Process ◽  
Silicon Etching ◽  
Plasma Chemical

scholarly journals Financial Control over the Implementation of the “Megasience” Class Scientific Projects: Current State and Prospects of Improvement

2021 ◽  
Vol 16 (4) ◽  
pp. 39-46
Author(s):  
O. V. Boltinova
Keyword(s):  
Research And Development ◽  
Russian Federation ◽  
The State ◽  
Financial Control ◽  
Federal Programs ◽  
Current State ◽  
The Russian Federation ◽  
The Creation ◽  
Innovative Economy ◽  
Budget System

The paper is devoted to financial control exercised over the implementation of “megasience” class scientific projects. In order to create an innovative economy, the State continues to develop research and development, in particular the creation of unique projects of the “megasience” class. Funding for such studies is usually carried out from budgets of various levels of the Russian Federation’s budgetary system as part of priority national projects or federal programs. Therefore, state financial control over the effective and targeted use of funds of the budgets of the budget system of the Russian Federation gains importance. The paper discusses the current conditions of state financial control over the implementation of scientific projects of the “megasience” class, defines the list of subjects possessing the powers of both internal and external state financial control, highlights their differences and characteristics. The author carries out the analysis of monitoring as one of the activities of the Accounts Chamber of the Russian Federation, where emphasis is made on budgetary monitoring. The paper analyzes problems and shortcomings in the implementation of state financial control over the scientific projects. It also describes the features of the current state of state financial control and highlights tendencies of its development and improvement.

INNOVATIVE DIRECTIONS OF DEVELOPMENT OF VINEGAR PRODUCTION IN THE REPUBLIC OF BELARUS

2020 ◽  
Vol 13 (4(50)) ◽  
pp. 52-60
Author(s):  
A. A. Pushkar ◽  
D. V. Khlimankov ◽  
V. I. Solovei ◽  
A. V. Rybak ◽  
J. N. Shcherbitskaya
Keyword(s):  
Research And Development ◽  
Ethyl Alcohol ◽  
Raw Materials ◽  
Technological Scheme ◽  
Development Work ◽  
Organoleptic Characteristics ◽  
The Creation ◽  
The Republic

he article presents the results of research and development work on the creation of technologies for the production of new types of vinegar based on starch-containing raw materials with original organoleptic characteristics. The introduction of this technology at the enterprise provides for the introduction of a new stage of the mechanical-enzymatic destruction of starch-containing raw materials with its biotransformation into ethyl alcohol into the current technological scheme of the enterprise.

scholarly journals Intellectual Property Management in Publicly Funded R&D Program and Projects: Optimizing Principal–Agent Relationship through Transdisciplinary Approach

2020 ◽  
Vol 12 (23) ◽  
pp. 9923
Author(s):  
Shuto Miyashita ◽  
Shogo Katoh ◽  
Tomohiro Anzai ◽  
Shintaro Sengoku
Keyword(s):  
Intellectual Property ◽  
Network Analysis ◽  
Research And Development ◽  
The Body ◽  
Principal Agent ◽  
Property Management ◽  
Publicly Funded ◽  
Intellectual Property Management ◽  
The Creation ◽  
Principal Agent Relationship

Large-scale, publicly funded research and development (R&D) programs are implemented to accelerate state-of-the-art science, technology, and innovation applications that are expected to solve various societal problems. The present study aims to build on the body of theory on the mechanisms that promote or impede the creation of intellectual property in such programs. Using a mixed methods approach and combining quantitative network analysis and qualitative semistructured interviews, we conducted a case study to investigate best practices in terms of intellectual property creation in a Japanese governmental research and development program. The results of the network analysis showed that the core/periphery structure in the co-inventor network of patents and joint application by a university and a startup promoted intellectual property creation. The results of the interview confirmed the significance of a reciprocal mindset, which the researchers in academia could acquire through collaboration with a startup. These results suggest that a knowledge logistics system for agile intellectual property management can be established by learning to acquire tacit knowledge on social implementation. Furthermore, we focus on the principal–agent relationship between knowledge producers and knowledge consumers as a factor that impedes the creation of intellectual property. We also discuss adverse selection and moral hazards caused by information asymmetry between knowledge producers and knowledge consumers and how to deal with them.

Plasma-Reactor Wall Interactions: Bromine-Fluorine Chemistry Duality in an Industrial Dry Etch Process

2015 ◽  
Vol 1803 ◽  
Author(s):  
M. Rizquez ◽  
A. Roussy ◽  
B. Bortoloti ◽  
J. Pinaton ◽  
Y. Goasduff
Keyword(s):  
Plasma Reactor ◽  
Industrial Process ◽  
Etching Process ◽  
Reactor Wall ◽  
Silicon Etching ◽  
Fluorine Chemistry ◽  
Starting Point ◽  
Dry Etch ◽  
Over Time ◽  
Wall Interactions

ABSTRACTThe purpose of the present paper is to investigate the composition of the coating formed on the plasma reactor walls after an industrial process which is divided into two steps, where the chemistries used are CF4/CH2F2 followed by HBr/O2. Since Fluorine traces have been detected through the plasma and over the wafer even during the second chemistry, investigations of the Br-F chemistry duality for a new silicon etching process have been performed in order to see the reactions which are taking place inside of the reactor. The understanding of these formations is really important to avoid process instabilities and get better performance of the transistors. The coating on the walls after the process and after the cleaning between wafers has been characterized in order to figure out the level of F traces after each step and to understand the reminiscence of this element over time. This study is the starting point to propose a modification on the Waferless AutoClean (WAC) used nowadays in an industrial process.

scholarly journals The Reciprocal Relationship between Research and Development: An Example Involving a Decoding Strand for Poor Readers

1995 ◽  
Vol 27 (3) ◽  
pp. 337-377 ◽  
Author(s):  
Robert W. Gaskins ◽  
Irene W. Gaskins ◽  
Richard C. Anderson ◽  
Marlene Schommer
Keyword(s):  
Action Research ◽  
Research And Development ◽  
Program Development ◽  
Phonemic Awareness ◽  
Word Identification ◽  
Development Project ◽  
Reciprocal Relationship ◽  
Poor Readers ◽  
Development Projects ◽  
The Creation

The two major goals of this paper are to describe a 5-year research and development project that led to the creation of a decoding program for poor readers in Grades 1–8 and to report the results of our research along the way. Unlike most research and development projects, research did not simply follow program development and assess its effectiveness. Instead, action research was used as a means of developing the program and program development led to modifications in the research as well. Thus, research and development had a reciprocal relationship and evolved together. The word identification program that eventually took shape emphasized phonemic awareness and decoding by analogy. Our findings were consistent with the conclusion that the word identification program enabled students to become better decoders and allowed them to make small gains in spelling, vocabulary, and comprehension.

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