Barium titanate (BaTiO3) nanoparticles with various particle sizes from 20 to 430 nm were prepared using a 2-step
thermal decomposition method. Powder dielectric measurement clarified that dielectric constant of BaTiO3 particles
with 140 nm exhibited a maximum around 5,000. To explain this high dielectric constant, THz-region dielectric
properties of BaTiO3 nanoparticles, especially Slater transverse optic (TO) mode frequency, were estimated using the
far infrared (FIR) reflection method. As the result, it was found that the Slater TO mode of BaTiO3 particles with 140
nm exhibited a minimum. Therefore, the high dielectric constant around 5,000 at 140 nm can be originated
from the softening of the Slater TO mode.