The detection technique of small module gears has a very important research and
application value. In this paper, a composite measuring method is presented based on combining
traditional mechanical contact measurement with optical image non-contact measurement. First of
all, this paper analyzes the basic principle of composite probe composed of optical fiber stylus and
CCD imaging system. The tail-end of the stylus is shaped into a micro-sphere, where a small
refection mirror is designed. When the laser is transmitted through the fiber, a round facula can be
seen from the CCD camera. The micro-sphere is kept contact with the surface of the measured gear
at the time of measuring and the error of the measured gear will be reflected by the offset of the
facula center. Meanwhile, the sub-pixel extraction algorithm for the center of facula image is
presented. Then the calibration principle and method of probe system is analyzed in detail. Finally,
the data processing principle of the presented method is discussed for gear measurement.