Study on Phase-Shifting Profilometry of Tilted Measurement System

2012 ◽  
Vol 562-564 ◽  
pp. 2157-2162
Author(s):  
Bai Tong He ◽  
Jian Liang Xu
Keyword(s):  
Measurement System ◽  
Imaging System ◽  
Optical Axis ◽  
Phase Shifting ◽  
Reference Plane ◽  
Height Distribution ◽  
Entrance Pupil ◽  
Ccd Imaging ◽  
Tilting Angle ◽  
Equal Height

Based on research of the traditional phase-shifting profilometry (PSP) method, a tilted measurement system is proposed. The proposed technology makes three constraints of the traditional phase-shifting profilometry measurement system less constrains. The exit pupil of the projecting system and the entrance pupil of the CCD imaging system are not horizontal and not placed at equal height. The optical axis in the CCD imaging system is not necessarily perpendicular with a specific tilting angle to the reference plane. The optical axises of the CCD imaging system and projecting system are not coplanar. The two axises do not intersect with each other. Compared to the traditional phase-shifting profilometry the proposed method offers a flexible way to calculate height distribution.

ON OPTIMUM PUPIL FIELDS WITH MAXIMUM ELECTRIC FIELD COMPONENT IN FOCUS

2010 ◽  
Vol 19 (01) ◽  
pp. 189-201
Author(s):  
H. P. URBACH ◽  
S. F. PEREIRA ◽  
D. J. BROER
Keyword(s):  
Electric Field ◽  
Field Component ◽  
Optical Axis ◽  
Focal Point ◽  
Longitudinal Component ◽  
Electric Field Component ◽  
Incident Power ◽  
Entrance Pupil ◽  
Maximum Electric Field ◽  
High Na Lens

The field in the entrance pupil of a high NA lens can be optimized such that, for given incident power, the electric field component in a given direction in the focal point is maximum. If the field component is chosen parallel to the optical axis, the longitudinal component is maximized and it is found that the optimum longitudinal component is narrower than the Airy spot. We discuss how this can be used to obtain higher resolution in photolithography when a resist is used that is sensitive to only the longitudinal component. We describe a proposition for realizing such resist.

32-megapixel dual-color CCD imaging system

1993 ◽  
Author(s):  
Christopher W. Stubbs ◽  
Stuart L. Marshall ◽  
Kenneth H. Cook ◽  
Robert Hills ◽  
Joseph P. Noonan ◽  
...  
Keyword(s):  
Imaging System ◽  
Ccd Imaging ◽  
Dual Color

Research on Online Measurement Method of Hole Diameter and Position

2013 ◽  
Vol 347-350 ◽  
pp. 197-200
Author(s):  
Yu Gong ◽  
Jing Cai Zhang ◽  
Hong Qi Liu
Keyword(s):  
Comparative Analysis ◽  
Measurement System ◽  
Measurement Method ◽  
Measurement Methods ◽  
Hole Diameter ◽  
Laser Sensor ◽  
Online Measurement ◽  
Online Detection ◽  
Ccd Imaging ◽  
Inductive Sensor

In this paper, research on measurement methods of hole during the parts online detection has been made. Both diameter and position of the hole are going to be detected in the same measurement system. In order to obtain higher accuracy and efficiency, a comparative analysis test of using the contact probes, the inductive sensor, the laser sensor, the forward and back lighting CCD imaging have been achieved. Results show that the contact measurement using inductive sensor is more suitable for the system, for the reason that it has higher reliability and efficiency.

Non-Uniformity Correction for Multi-Channel TDI CCD Imaging System in Wide Response Range

2017 ◽  
Vol 37 (11) ◽  
pp. 1111001
Author(s):  
郑亮亮 Zheng Liangliang ◽  
金 光 Jin Guang ◽  
曲宏松 Qu Hongsong ◽  
张贵祥 Zhang Guixiang
Keyword(s):  
Imaging System ◽  
Ccd Imaging ◽  
Response Range

scholarly journals Absolute distance interferometry for subaperture stitching of large freeform optics

2020 ◽  
Vol 238 ◽  
pp. 06011
Author(s):  
Jan Spichtinger ◽  
Michael Schulz ◽  
Gerd Ehret
Keyword(s):  
Measurement System ◽  
Optical Axis ◽  
Distance Measurement ◽  
Fizeau Interferometer ◽  
Absolute Distance ◽  
Local Surface ◽  
Surface Gradient ◽  
Freeform Optics ◽  
The Absolute ◽  
Subaperture Stitching

We are developing a form measurement system for the surfaces of freeform optics and large conventional optics. The specifications of the optics are diameters up to 1.5 m and radii of curvature down to 10 m. This includes optics like telescope mirror segments and synchrotron optics. Using a Fizeau interferometer, we propose a subaperture stitching method that involves vertically aligning the interferometer’s optical axis to the local surface gradient and measuring the absolute distance from the interferometer’s reference flat to the specimen. Experimental results for the absolute distance measurement are shown.

3D shape measurement system based on fringe projection in 4-step phase shifting

2015 ◽  
Vol 36 (4) ◽  
pp. 584-589 ◽  
Author(s):  
Shang Zhong-yi ◽  
Li Wei-xian ◽  
Dong Ming-li ◽  
Duan Liang-jun
Keyword(s):  
Measurement System ◽  
Phase Shifting ◽  
Fringe Projection ◽  
Shape Measurement ◽  
3D Shape ◽  
3D Shape Measurement

scholarly journals Quantification of mRNA by non-radioactive RT-PCR and CCD imaging system

1992 ◽  
Vol 20 (18) ◽  
pp. 4939-4939 ◽  
Author(s):  
Hiroki Nakayama ◽  
Hiromichi Yokoi ◽  
Jun Fujita
Keyword(s):  
Imaging System ◽  
Rt Pcr ◽  
Ccd Imaging

Study on the Composite Measuring Method for Small Module Gears

2008 ◽  
Vol 381-382 ◽  
pp. 83-86
Author(s):  
Jian Jun Ding ◽  
Zhuang De Jiang ◽  
Bing Li ◽  
Jun Jie Guo
Keyword(s):  
Imaging System ◽  
Ccd Camera ◽  
Measuring Method ◽  
Important Research ◽  
Mechanical Contact ◽  
Ccd Imaging ◽  
Contact Measurement ◽  
Extraction Algorithm ◽  
Probe System ◽  
Micro Sphere

The detection technique of small module gears has a very important research and application value. In this paper, a composite measuring method is presented based on combining traditional mechanical contact measurement with optical image non-contact measurement. First of all, this paper analyzes the basic principle of composite probe composed of optical fiber stylus and CCD imaging system. The tail-end of the stylus is shaped into a micro-sphere, where a small refection mirror is designed. When the laser is transmitted through the fiber, a round facula can be seen from the CCD camera. The micro-sphere is kept contact with the surface of the measured gear at the time of measuring and the error of the measured gear will be reflected by the offset of the facula center. Meanwhile, the sub-pixel extraction algorithm for the center of facula image is presented. Then the calibration principle and method of probe system is analyzed in detail. Finally, the data processing principle of the presented method is discussed for gear measurement.

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