Improvement in Characteristic Variability of TFTs Using Grain Growth Control by Micro Thermal Plasma Jet Irradiation on a-Si Strips

2014 ◽  
Vol 10 (11) ◽  
pp. 950-955 ◽  
Author(s):  
Seiji Morisaki ◽  
Shohei Hayashi ◽  
Yuji Fujita ◽  
Seiichiro Higashi
Keyword(s):  
Grain Growth ◽  
Thermal Plasma ◽  
Growth Control ◽  
Plasma Jet ◽  
Thermal Plasma Jet

Effect of Grain Growth Control by Atmospheric Micro-Thermal- Plasma-Jet Crystallization of Amorphous Silicon Strips on TFT Characteristics

2014 ◽  
Vol 64 (10) ◽  
pp. 23-29 ◽  
Author(s):  
S. Morisaki ◽  
S. Hayashi ◽  
S. Yamamoto ◽  
T. Nakatani ◽  
S. Higashi
Keyword(s):  
Amorphous Silicon ◽  
Grain Growth ◽  
Thermal Plasma ◽  
Growth Control ◽  
Plasma Jet ◽  
Thermal Plasma Jet

Grain Growth Control during Micro-Thermal-Plasma-Jet Irradiation Using Amorphous Si Strips and Slit Masks

2013 ◽  
Vol 50 (8) ◽  
pp. 29-34
Author(s):  
Y. Fujita ◽  
S. Hayashi ◽  
K. Sakaike ◽  
S. Higashi
Keyword(s):  
Grain Growth ◽  
Thermal Plasma ◽  
Growth Control ◽  
Plasma Jet ◽  
Thermal Plasma Jet ◽  
Amorphous Si

scholarly journals Direct observation of grain growth from molten silicon formed by micro-thermal-plasma-jet irradiation

2012 ◽  
Vol 101 (17) ◽  
pp. 172111 ◽  
Author(s):  
Shohei Hayashi ◽  
Yuji Fujita ◽  
Takahiro Kamikura ◽  
Kohei Sakaike ◽  
Muneki Akazawa ◽  
...  
Keyword(s):  
Grain Growth ◽  
Direct Observation ◽  
Thermal Plasma ◽  
Plasma Jet ◽  
Molten Silicon ◽  
Thermal Plasma Jet

Control of substrate surface temperature in millisecond annealing technique using thermal plasma jet

2007 ◽  
Vol 515 (12) ◽  
pp. 4897-4900 ◽  
Author(s):  
T. Okada ◽  
S. Higashi ◽  
H. Kaku ◽  
N. Koba ◽  
H. Murakami ◽  
...  
Keyword(s):  
Surface Temperature ◽  
Thermal Plasma ◽  
Substrate Surface ◽  
Plasma Jet ◽  
Thermal Plasma Jet

A new crystallization technique of Si films on glass substrate using thermal plasma jet

2005 ◽  
Vol 244 (1-4) ◽  
pp. 8-11 ◽  
Author(s):  
H. Kaku ◽  
S. Higashi ◽  
H. Taniguchi ◽  
H. Murakami ◽  
S. Miyazaki
Keyword(s):  
Thermal Plasma ◽  
Glass Substrate ◽  
Plasma Jet ◽  
Thermal Plasma Jet ◽  
Si Films
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