Grain Growth Control by Micro-Thermal-Plasma-Jet Irradiation to Very Narrow Amorphous Silicon Strips and Its Application to Thin Film Transistors

2014 ◽  
Author(s):  
S. Yamamoto ◽  
S. Morisaki ◽  
S. Hayashi ◽  
T. Nakatani ◽  
S. Higashi
Keyword(s):  
Thin Film ◽  
Amorphous Silicon ◽  
Grain Growth ◽  
Thermal Plasma ◽  
Thin Film Transistors ◽  
Growth Control ◽  
Plasma Jet ◽  
Thermal Plasma Jet

Effect of Grain Growth Control by Atmospheric Micro-Thermal- Plasma-Jet Crystallization of Amorphous Silicon Strips on TFT Characteristics

2014 ◽  
Vol 64 (10) ◽  
pp. 23-29 ◽  
Author(s):  
S. Morisaki ◽  
S. Hayashi ◽  
S. Yamamoto ◽  
T. Nakatani ◽  
S. Higashi
Keyword(s):  
Amorphous Silicon ◽  
Grain Growth ◽  
Thermal Plasma ◽  
Growth Control ◽  
Plasma Jet ◽  
Thermal Plasma Jet

Grain Growth Control during Micro-Thermal-Plasma-Jet Irradiation Using Amorphous Si Strips and Slit Masks

2013 ◽  
Vol 50 (8) ◽  
pp. 29-34
Author(s):  
Y. Fujita ◽  
S. Hayashi ◽  
K. Sakaike ◽  
S. Higashi
Keyword(s):  
Grain Growth ◽  
Thermal Plasma ◽  
Growth Control ◽  
Plasma Jet ◽  
Thermal Plasma Jet ◽  
Amorphous Si
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