Control of substrate surface temperature in millisecond annealing technique using thermal plasma jet

2007 ◽  
Vol 515 (12) ◽  
pp. 4897-4900 ◽  
Author(s):  
T. Okada ◽  
S. Higashi ◽  
H. Kaku ◽  
N. Koba ◽  
H. Murakami ◽  
...  
Keyword(s):  
Surface Temperature ◽  
Thermal Plasma ◽  
Substrate Surface ◽  
Plasma Jet ◽  
Thermal Plasma Jet

Effect of He addition on the heating characteristics of substrate surface irradiated by Ar thermal plasma jet

2008 ◽  
Vol 516 (11) ◽  
pp. 3680-3683 ◽  
Author(s):  
T. Okada ◽  
S. Higashi ◽  
H. Kaku ◽  
N. Koba ◽  
H. Murakami ◽  
...  
Keyword(s):  
Thermal Plasma ◽  
Substrate Surface ◽  
Plasma Jet ◽  
Thermal Plasma Jet

A new crystallization technique of Si films on glass substrate using thermal plasma jet

2005 ◽  
Vol 244 (1-4) ◽  
pp. 8-11 ◽  
Author(s):  
H. Kaku ◽  
S. Higashi ◽  
H. Taniguchi ◽  
H. Murakami ◽  
S. Miyazaki
Keyword(s):  
Thermal Plasma ◽  
Glass Substrate ◽  
Plasma Jet ◽  
Thermal Plasma Jet ◽  
Si Films

Investigation on electrical characteristics of TFTs fabricated with germanium films crystallized by atmospheric pressure micro-thermal-plasma-jet irradiation

2021 ◽  
Author(s):  
Takuma Sato ◽  
Hiroaki Hanafusa ◽  
Seiichiro HIGASHI
Keyword(s):  
Thermal Plasma ◽  
Atmospheric Pressure ◽  
Hole Concentration ◽  
Thin Film Transistor ◽  
Plasma Jet ◽  
Scanning Speed ◽  
Electrical Characteristics ◽  
Thermal Plasma Jet ◽  
High Carrier Mobility ◽  
High Carrier

Abstract Crystalline-germanium (c-Ge) is an attractive material for a thin-film transistor (TFT) channel because of its high carrier mobility and applicability to a low-temperature process. We present the electrical characteristics of c-Ge crystallized by atmospheric pressure micro-thermal-plasma-jet (µ-TPJ). The µ-TPJ crystalized c-Ge showed the maximum Hall mobility of 1070 cm2·V−1·s−1 with its hole concentration of ~ 1016 cm−3, enabling us to fabricate the TFT with field-effect mobility (μ FE) of 196 cm2·V−1·s−1 and ON/OFF ratio (R ON/OFF) of 1.4 × 104. On the other hand, RON/OFFs and μFEs were dependent on the scanning speed of the TPJ, inferring different types of defects were induced in the channel regions. These findings show not only a possibility of the TPJ irradiation as a promising method to make a c-Ge TFT on insulating substrates.

Spatial Dynamics of Coherent Structures in a Thermal Plasma Jet

2008 ◽  
Vol 36 (4) ◽  
pp. 1066-1067 ◽  
Author(s):  
J. Hlina ◽  
Z. Sekeresova ◽  
J. Sonsky
Keyword(s):  
Coherent Structures ◽  
Thermal Plasma ◽  
Spatial Dynamics ◽  
Plasma Jet ◽  
Thermal Plasma Jet

Fabrication of dispersible graphene flakes using thermal plasma jet and their thin films for solar cells

Carbon ◽  
2016 ◽  
Vol 106 ◽  
pp. 48-55 ◽  
Author(s):  
Myung Woo Lee ◽  
Hyun-Young Kim ◽  
Hyeokjin Yoon ◽  
Juhan Kim ◽  
Jung Sang Suh
Keyword(s):  
Thin Films ◽  
Solar Cells ◽  
Thermal Plasma ◽  
Plasma Jet ◽  
Thermal Plasma Jet ◽  
Graphene Flakes
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