Distributed MEMS Mass-Sensor Based on Piezoelectric Resonant Micro-Cantilevers

2019 ◽  
Vol 28 (3) ◽  
pp. 382-389 ◽  
Author(s):  
Priyanka Joshi ◽  
Sanjeev Kumar ◽  
V. K. Jain ◽  
Jamil Akhtar ◽  
Jitendra Singh
Keyword(s):  
Mass Sensor ◽  
Mems Mass Sensor

Frequency Sweeping With Concurrent Parametric Amplification

2008 ◽  
Author(s):  
Nicholas J. Miller ◽  
Steven W. Shaw
Keyword(s):  
Quality Factor ◽  
Parametric Excitation ◽  
Mechanical Systems ◽  
Parametric Amplification ◽  
Stability Conditions ◽  
Mass Sensor ◽  
Modal Interactions ◽  
Numerical Example ◽  
Mems Mass Sensor ◽  
Frequency Sweeping

In this paper we explore parametric amplification of multidegree of freedom mechanical systems. We consider frequency conditions for modal interactions and determine stability conditions for three important cases. We develop conditions under which it is possible to sweep with direct and parametric excitation to produce a sweep response with amplified effective quality factor of resonances encountered during the sweep. With this technique it is possible to improve the measurement of resonance locations in swept devices, such as those that operate on resonance shifting. A numerical example motivated by a MEMS mass sensor is given in support of the analysis.

Issues associated with scaling up production of a lab demonstrated MEMS mass sensor

2012 ◽  
Vol 22 (11) ◽  
pp. 115032 ◽  
Author(s):  
Pedro Ortiz ◽  
Richie Burnett ◽  
Neil Keegan ◽  
Julia Spoors ◽  
John Hedley ◽  
...  
Keyword(s):  
Scaling Up ◽  
Mass Sensor ◽  
Mems Mass Sensor

scholarly journals Enhancing the linear dynamic range of a mode-localized MEMS mass sensor with repulsive electrostatic actuation

2021 ◽  
Author(s):  
Toky Harrison RABENIMANANA ◽  
Vincent Walter ◽  
Najib Kacem ◽  
Patrice Le Moal ◽  
Gilles Bourbon ◽  
...  
Keyword(s):  
Dynamic Range ◽  
Electrostatic Actuation ◽  
Mass Sensor ◽  
Linear Dynamic Range ◽  
Linear Dynamic ◽  
Mems Mass Sensor

Effect of cubic nonlinearity on auto-parametrically amplified resonant MEMS mass sensor

2002 ◽  
Vol 102 (1-2) ◽  
pp. 139-150 ◽  
Author(s):  
Wenhua Zhang ◽  
Rajashree Baskaran ◽  
Kimberly L. Turner
Keyword(s):  
Mass Sensor ◽  
Cubic Nonlinearity ◽  
Mems Mass Sensor

High resonant mass sensor evaluation: An effective method

2005 ◽  
Vol 76 (11) ◽  
pp. 115101 ◽  
Author(s):  
Yakov M. Tseytlin
Keyword(s):  
Mass Sensor

scholarly journals Optically Accessible MEMS Resonant Mass Sensor for Biological Applications

2019 ◽  
Vol 28 (3) ◽  
pp. 494-503 ◽  
Author(s):  
Ethan G. Keeler ◽  
Chen Zou ◽  
Lih Y. Lin
Keyword(s):  
Biological Applications ◽  
Mass Sensor

Vibration Analysis of Single Walled Boron Nitride Nanotube Based Nanoresonators

2012 ◽  
Vol 3 (3) ◽  
Author(s):  
Mitesh B. Panchal ◽  
S. H. Upadhyay ◽  
S. P. Harsha
Keyword(s):  
Boron Nitride ◽  
Resonant Frequency ◽  
Continuum Mechanics ◽  
Boron Nitride Nanotubes ◽  
Response Analysis ◽  
Published Data ◽  
Boron Nitride Nanotube ◽  
Mass Sensor ◽  
Nanomechanical Resonators ◽  
Mass Sensitivity

In this paper, the vibration response analysis of single walled boron nitride nanotubes (SWBNNTs) treated as thin walled tube has been done using finite element method (FEM). The resonant frequencies of fixed-free SWBNNTs have been investigated. The analysis explores the resonant frequency variations as well as the resonant frequency shift of the SWBNNTs caused by the changes in size of BNNTs in terms of length as well as the attached masses. The performance of cantilevered SWBNNT mass sensor is also analyzed based on continuum mechanics approach and compared with the published data of single walled carbon nanotube (SWCNT) for fixed-free configuration as a mass sensor. As a systematic analysis approach, the simulation results based on FEM are compared with the continuum mechanics based analytical approach and are found to be in good agreement. It is also found that the BNNT cantilever biosensor has better response and sensitivity compared to the CNT as a counterpart. Also, the results indicate that the mass sensitivity of cantilevered boron nitride nanotube nanomechanical resonators can reach 10−23 g and the mass sensitivity increases when smaller size nanomechanical resonators are used in mass sensors.

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