The INFLUENCE OF surface roughness of aluminum films on quality factor of microelectronic BAW-resonator

2018 ◽  
pp. 112-120
Author(s):  
V. N. Zima ◽  
◽  
T. N. Torgash ◽  
A. G. Kozlov ◽  
◽  
...  
Keyword(s):  
Surface Roughness ◽  
Quality Factor ◽  
Aluminum Films

Effects of Surface Roughness and Oxide Layer on the Thermal Boundary Conductance at Aluminum/Silicon Interfaces

2010 ◽  
Author(s):  
Patrick E. Hopkins ◽  
Leslie M. Phinney ◽  
Justin R. Serrano ◽  
Thomas E. Beechem
Keyword(s):  
Surface Roughness ◽  
Oxide Layer ◽  
Boundary Resistance ◽  
Film Deposition ◽  
Native Oxide ◽  
Thermal Boundary Resistance ◽  
Native Oxide Layer ◽  
Aluminum Films ◽  
Thermal Boundary Conductance ◽  
Material Length

Thermal boundary resistance dominates the thermal resistance in nanosystems since material length scales are comparable to material mean free paths. The primary scattering mechanism in nanosystems is interface scattering, and the structure and composition around these interfaces can affect scattering rates and, therefore, device thermal resistances. In this work, the thermal boundary conductance (the inverse of the thermal boundary resistance) is measured using a pump-probe thermoreflectance technique on aluminum films grown on silicon substrates that are subjected to various pre-Al-deposition surface treatments. The Si surfaces are characterized with Atomic Force Microscopy (AFM) to determine mean surface roughness. The measured thermal boundary conductance decreases as Si surface roughness increases. In addition, stripping the native oxide layer on the surface of the Si substrate immediately prior to Al film deposition causes the thermal boundary conductance to increase. The measured data are then compared to an extension of the diffuse mismatch model that accounts for interfacial mixing and structure around the interface.

Study on Surface Roughness Transformation during Metal Rolling

2012 ◽  
Vol 706-709 ◽  
pp. 2517-2522
Author(s):  
Saud Almotairy ◽  
Dong Bin Wei ◽  
Zheng Yi Jiang
Keyword(s):  
Surface Roughness ◽  
Quality Factor ◽  
Processing Parameters ◽  
Experimental Results ◽  
Thin Strip ◽  
Manufacturing Processes ◽  
Strip Surface ◽  
New Findings ◽  
Cold Rolled

Increasing the demand for cold rolled ultra thin strip as feedstock for miniaturized products has encouraged researchers to investigate the ways to increase the quality of such products, especially those related to strip surface roughness. Surface is known as quality factor in most of manufacturing processes. In this paper, the effect of the rolling parameters on the surface roughness transformation during metal rolling has been studied. The experimental results demonstrate that the surface roughness transformation during the metal rolling is highly affected by the designation of the processing parameters such as finishing temperature, reduction, rolling passes and lubrication. The results have been discussed to verify the validity of the new findings.

Study on Surface Roughness Transformation during Metal Rolling

2011 ◽  
Vol 418-420 ◽  
pp. 897-902
Author(s):  
Saud Almotairy ◽  
Dong Bin Wei ◽  
Zheng Yi Jiang
Keyword(s):  
Surface Roughness ◽  
Quality Factor ◽  
Processing Parameters ◽  
Experimental Results ◽  
Thin Strip ◽  
Manufacturing Processes ◽  
Strip Surface ◽  
New Findings ◽  
Cold Rolled

Increasing the demand for cold rolled ultra thin strip as feedstock for miniaturized products has encouraged researchers to investigate the ways to increase the quality of such products, especially those related to strip surface roughness. Surface is known as quality factor in most of manufacturing processes. In this paper, the effect of the rolling parameters on the surface roughness transformation during metal rolling has been studied. The experimental results demonstrate that the surface roughness transformation during metal rolling is highly affected by the designation of the processing parameters such as finishing temperature, reduction, rolling passes and lubrication. The results have been discussed to verify the validity of the new findings.

Surface Roughness Characterization of al Films by Spectroscopic Ellipsometry

1985 ◽  
Vol 54 ◽  
Author(s):  
J. R. Blanco ◽  
K. Vedam ◽  
P. J. McMarr ◽  
J. M. Bennett
Keyword(s):  
Surface Roughness ◽  
Rough Surface ◽  
Spectroscopic Ellipsometry ◽  
Rough Surfaces ◽  
Scalar Theory ◽  
Nondestructive Technique ◽  
Aluminum Films ◽  
Random Rough Surfaces ◽  
Scalar Theory Of Diffraction

ABSTRACTWell characterized rough surfaces of aluminum films have been studied by the nondestructive technique of Spectroscopie Ellipsometry (SE). The roughness of the aluminum specimens had been characterized earlier by Total Integrated Scattering and Stylus Profilometry techniques to obtain numerical estimates of ras roughness and autocovariance lengths. The present SE measurements on these specimens were carried out at a number of angles of incidence in the range 30–80° and at a number of discrete wavelengths in the spectral range 300–650nm. The SE results were then analyzed by the scalar theory of diffraction from random rough surfaces by treating the surface as a simple random rough surface. The results of such analyses of the SE measurements are compared with the results of the earlier characterization techniques.

Characterization of sputtered Al-B-Si thin films produced with composite targets for device applications

2012 ◽  
Vol 19 (2) ◽  
pp. 93-99 ◽  
Author(s):  
Glorimar Ramos ◽  
O. Marcelo Suárez
Keyword(s):  
Surface Roughness ◽  
Pure Aluminum ◽  
Centrifugal Casting ◽  
Lower Surface ◽  
Film Structure ◽  
Aluminum Films ◽  
Aluminum Target ◽  
Si Substrates ◽  
Roughness Analysis ◽  
Device Applications

AbstractSputtered films were deposited over glass and silicon (Si) substrates by using homemade centrifuged aluminum (Al) targets containing boron (B) AlB2 and AlB12 particles as their constituents. Additional films were produced with an as-received aluminum target for comparison purposes. The composite targets were mounted in the magnetron sputtering system working at varying discharge powers, ranging from 200 to 450 W, to produce films with the smallest surface roughness. This roughness analysis showed that films deposited from the composite targets (fabricated by centrifugal casting) possessed lower surface roughness than the pure aluminum films if they were deposited over silicon substrates. Also, preliminary studies of film structure and mechanical properties revealed that the films produced with the composite targets had smaller grain size, dominant compression stresses, higher disorder in the crystalline structure, and higher hardness and elastic modulus, when compared with the films produced with the pure aluminum target.

scholarly journals Manufacture of Hemispherical Shell and Surrounding Eave-Shaped Electrodes

Micromachines ◽  
2021 ◽  
Vol 12 (7) ◽  
pp. 815
Author(s):  
Renxin Wang ◽  
Bing Bai ◽  
Wendong Zhang ◽  
Huiliang Cao ◽  
Jun Liu
Keyword(s):  
Surface Roughness ◽  
Quality Factor ◽  
Shell Thickness ◽  
Estimation Method ◽  
Fabrication Process ◽  
Electrical Insulation ◽  
Hemispherical Shell ◽  
Hemispherical Resonator ◽  
The Asymmetry

A hemispherical resonator consists of a hemispherical shell and the surrounding circular electrodes. The asymmetry of a hemispherical shell has influence on the vibrating mode and quality factor. The gap distance from shell to electrode is critical for the capacitance and sensitivity of a hemispherical resonator. To realize a symmetric shell and a small gap, a kind of micro-hemispherical resonator (μHR) structure including sandwich-shaped stacks and eave-shaped electrodes has been developed using a glassblowing process. The blowing process could bring favorable surface roughness and symmetry. The locations of the hemispherical shell and surrounding electrodes can be precisely controlled by the designs of sandwich-shaped stacks and eave-shaped electrodes, making it feasible to realize uniform and small gaps. In addition, electrical insulation between the hemispherical shell and eave-shaped electrodes can be guaranteed owing to eave-shaped structure. The fabrication process and results are demonstrated in detail. Furthermore, an estimation method of shell thickness in a nondestructive manner is proposed, with deviation below 5%. Taking asymmetry, surface roughness, and gap into consideration, these results preliminarily indicate this structure with a hemispherical shell and surrounding eave-shaped electrodes is promising in hemispherical resonator applications.

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