Wide-Range Displacement Sensor Based on Fiber-Optic Fabry–Perot Interferometer for Subnanometer Measurement

A wide range fiber optic sensor system for displacement and crack monitoring is developed. In the proposed fiber optic sensor system, a number of fiber loops are formed from a single fiber and each fiber loop is used as a crack or displacement sensor. The feasibility and the dynamic range of the fiber sensor developed in this manner are investigated experimentally. Both glass fibers and plastic fibers are used in the experiments. Experimental results show that the new fiber optic sensor has a wide range (maximum range is 88 mm) and this sensor also has a high sensitivity for displacement and crack monitoring when an appropriate diameter of the fiber loop is selected as the sensor. Moreover, the proposed method is very simple and has low cost, so in situ application potential of the proposed sensor is high.

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Micromachining of an In-Fiber Extrinsic Fabry-Perot Interferometric (MEFPI) Sensor by Using a Femtosecond Laser

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.364-366.1203 ◽

2007 ◽

Vol 364-366 ◽

pp. 1203-1206 ◽

Cited By ~ 1

Author(s):

Yun Jiang Rao ◽

Ming Deng ◽

Tao Zhu ◽

Qing Tao Tang ◽

Guang Hua Cheng

Keyword(s):

Femtosecond Laser ◽

Near Infrared ◽

Fiber Optic ◽

Low Cost ◽

Good Reliability ◽

Sensing Applications ◽

Wide Range ◽

Fabry Perot ◽

Integration Degree ◽

First Time

This paper reports a novel micro extrinsic fiber-optic F-P interferometric (MEFPI) sensor micromachined on a conventional optical fiber (Corning SMF-28) by using a near-infrared femtosecond laser, for the first time to the best of our knowledge. The strain and temperature characteristics of such a sensor were investigated and the experimental results show that the strain and temperature sensitivities are 0.006nm/με and -0.0017nm/°C, respectively. This type of MEFPI sensors has a number of advantages when compared with conventional EFPI sensors, such as easy fabrication, high integration degree, good reliability, low temperature cross-sensitivity, low cost, and capability for mass-production, offering great potential for a wide range of sensing applications.

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Surface quality control of thin SiN layer by optical measurements

Photonics Letters of Poland ◽

10.4302/plp.v13i3.1096 ◽

2021 ◽

Vol 13 (3) ◽

pp. 61

Author(s):

Jakub Gierowski ◽

Sandra Pawłowska

Keyword(s):

Refractive Index ◽

Surface Quality ◽

Surface Passivation ◽

Fiber Optic ◽

Optical Measurements ◽

Low Coherence ◽

Box Plots ◽

Wide Range ◽

Fabry Perot

Fiber optic interferometers have a wide range of applications including biological and chemical measurements. Nevertheless, in case of a reflective interferometer setup, standard silver mirrors cannot be used in every measurement, due to their chemical activity. In this work, we investigate the surface quality of a thin optical layer of silicon nitride (SiN) which can serve as an alternative material for silver mirrors. We present measurements carried out with a Fabry-Perot fiber optic interferometer working in a reflective mode. Measurement results allow us to determine the surface quality of the investigated layer. Full Text: PDF ReferencesK. Karpienko, M.S. Wróbel, M. Jedrzejewska-Szczerska, "Determination of refractive index dispersion using fiber-optic low-coherence Fabry-Perot interferometer: implementation and validation", Opt Express, 53, 077103 (2014). CrossRef Jedrzejewska-Szczerska M., Gnyba M., Kosmowski B. B. "Low-coherence fibre-optic interferometric sensors", Acta Phys. Pol. A 120, 621 (2011). CrossRef M. Jedrzejewska-Szczerska "Response of a new low-coherence Fabry-Perot sensor to hematocrit levels in human blood",Sensors 14(4), 6965 (2014). CrossRef M. Kosowska, D. Majchrowicz, K.J. Sankaran, M. Ficek, K. Haenen, M. Szczerska, "Doped Nanocrystalline Diamond Films as Reflective Layers for Fiber-Optic Sensors of Refractive Index of Liquids", Materials 12, 2124 (2019). CrossRef Shou-YiChang, Yi-Chung Huang, "Analyses of interface adhesion between porous SiO2 low-k film and SiC/SiN layers by nanoindentation and nanoscratch tests", Microelectron. Eng. 84(2), 319 (2007). CrossRef X. Wang, C. Wang, X. Shen, F. Sun, "Potential Material for Fabricating Optical Mirrors: Polished Diamond Coated Silicon Carbide". Appl. Opt. 56, 4113 (2017). CrossRef G. Coppola, P. Ferraro, M. Iodice, S. De Nicola, "Method for measuring the refractive index and the thickness of transparent plates with a lateral-shear, wavelength-scanning interferometer", Appl. Opt. 42, 3882 (2003). CrossRef H. Mäckel, R. Lüdemann, "Detailed study of the composition of hydrogenated SiNx layers for high-quality silicon surface passivation", J. Appl, Phys. 92, 2602 (2002). CrossRef N. Atman, M. Krzywinski, "Visualizing samples with box plots", Nat. Methods, 11(2), 119 (2014). CrossRef M. Vignesh, R. Balaji, "Data analysis using Box and Whisker Plot for Lung Cancer", International Conference on Innovations in Power and Advanced Computing Technologies,(2017). CrossRef

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